
1 Offered at $ 12,750.00

SEMITOOL/RHETECH SPIN RINSE DRYER 150 MM
Spin Rinse Dryer
Semitool/Rhetech Model 460S
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| Unit Price |
$ 12,750.00 |
| Number of Units |
1 |
| Manufacturer | Semitool |
| Model | 460S |
| Substrate Size | 5" |
| Wafer Size | 150 mm |
| Rotors Included | YES |
| Controller Type | Microprocessor Controller Type |
| Controller Model | PSC101 |
| Resistivity Monitor | YES |
| Rotor Model | A182-39-LMB |
| Built-In Resistivity Monitor | Included |
| SRD Configuration | Single Stack |
| Other Information | Bowl diameter: 9.78"
Single recipe
Integrated resistivity monitor
Single bolt rotor |
| Power Requirements | 115 V 15.0 A 50/60 Hz 1 Phase
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| Exterior Dimensions |  |
 | | Width | 14.500 in (36.8 cm) |
| Depth | 24.000 in (61.0 cm) |
| Height | 54.000 in (137.2 cm) |