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Metal Etchers
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Offered1 Offered at Best Price


OXFORD INSTRUMENTS REACTIVE ION ETCH SYSTEM 200MM


Reactive Ion Etch System

In addition to this Oxford Instruments Plasmalab 80 Plus, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching
equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, March Instruments, Oxford,
Plasma-Therm, STS, SPTS, Tegal, Trion, and Unaxis.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories

Learn about our Plasma Etching Equipment Refurbishment and Functional Testing Procedures

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed
on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

OXFORD INSTRUMENTS REACTIVE ION ETCH SYSTEM 200MM
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Unit Price Unstated
Number of Units 1
ManufacturerOxford Instruments
ModelPlasmalab 80 Plus
Wafer Size Range
  Maximum200 mm
ProcessReactive Ion Etch
Controller TypePC Controller Type
Software Revision LevelPC2000 Version 1.7A
RF Generator ModelDressler 300Watt, 13.56MHz
Automatch TextOxford OPT AMU
Number of Gas InputsThree Gas
Process GasesCF4, O2, Ar
Chillers
  Number of Chillers1
  Chiller #1Manufacturer/ModelNeslab RTE7
Other InformationGas Pod: 6 gas inputs (3 inputs in use)
Vacuum Pump Package: Leybold WSU 251 and Leybold D40BCS
Power Requirements208 V     26.0 A     50/60 Hz     3 Phase
Weight380  lb  (172 kg)

Shipping & Handling:

Unless otherwise stated, all items are fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions





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