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FULL DESCRIPTION of Item 126704 in

Cluster Plasma Tools - Metal

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Offered1 Offered at Best Price


ULVAC FERROELECTRIC ETCHER


Like New Condition
System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application


The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.





ULVAC FERROELECTRIC ETCHER
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Unit Price Unstated
Number of Units 1
ManufacturerUlvac
ModelNE 7800 Ferroelectric Etcher
Wafer Size Range
  Minimum150 mm
  Maximum200 mm
  Set Size200 mm
Number of Chambers4
Process CapabilitiesTa, FeRAM, RRAM, MRAM
Chamber 1 DescriptionPreheat Chamber
IR heater
Range: 200 to 600 deg C

Chamber 2 DescriptionISM ICP Etch
ESD Chuck, 450C, He BS Cooling
Bias power: 2000W, 400 KHz
Antenna power: 3000W, 13.56 MHZ
UTM 1400FW/DIK Turbo Pump
Ebara ESR20N Dry Pump
Gases: Ar, O2, SF6, C4F8, HBr, CL2, BCl3, CHF3

Chamber 3 DescriptionISM ICP Etch
ESD Chuck, He BS Cooling
Bias power: 2000W, 400 KHz
Antenna power: 3000W, 13.56 MHZ
UTM 1400FW/DIK Turbo Pump
Ebara ESR20N Dry Pump
Gases: Ar, O2, SF6, C4F8, HBr, CL2, BCl3, CHF3

Chamber 4 DescriptionMicrowave Ashing Chamber
Heated Chuck, 280C
Bias power: 600W, 13.56 MHz
Microwave power: 3000W, 2.45 GHz
Endpoint detection
Ebara ESR200WN Dry Pump
Gases: 02, 02, H2/N2, CF4, N2

External CoolingWater Cooled
Other Information(3) Cassette load ports
(2) SMC Corp Model HRZ002 Chiller-Etch Chambers
(1) Ebara ESR20N dry pump, loadlock/xfer mod

Extended DescriptionDetails at NE7800_BK1_CHP02.pdf
Power Requirements208 V     220.0 A     60 Hz     3¬†Phase
Year of Manufacture2008
ConditionLike New

Shipping & Handling:

Unless otherwise stated, all items are fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions





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