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FULL DESCRIPTION of Item 126704 in Cluster Plasma Tools - Metal

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1 Offered at Best Price ULVAC FERROELECTRIC ETCHER Like New Condition System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field). The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications. Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.  ... other images
Unit Price	Unstated
Number of Units	1
Manufacturer	Ulvac
Model	NE 7800 Ferroelectric Etcher
Wafer Size Range
Minimum	150 mm
Maximum	200 mm
Set Size	200 mm
Number of Chambers	4
Process Capabilities	Ta, FeRAM, RRAM, MRAM
Chamber 1 Description	Preheat Chamber IR heater Range: 200 to 600 deg C
Chamber 2 Description	ISM ICP Etch ESD Chuck, 450C, He BS Cooling Bias power: 2000W, 400 KHz Antenna power: 3000W, 13.56 MHZ UTM 1400FW/DIK Turbo Pump Ebara ESR20N Dry Pump Gases: Ar, O2, SF6, C4F8, HBr, CL2, BCl3, CHF3
Chamber 3 Description	ISM ICP Etch ESD Chuck, He BS Cooling Bias power: 2000W, 400 KHz Antenna power: 3000W, 13.56 MHZ UTM 1400FW/DIK Turbo Pump Ebara ESR20N Dry Pump Gases: Ar, O2, SF6, C4F8, HBr, CL2, BCl3, CHF3
Chamber 4 Description	Microwave Ashing Chamber Heated Chuck, 280C Bias power: 600W, 13.56 MHz Microwave power: 3000W, 2.45 GHz Endpoint detection Ebara ESR200WN Dry Pump Gases: 02, 02, H2/N2, CF4, N2
External Cooling	Water Cooled
Other Information	(3) Cassette load ports (2) SMC Corp Model HRZ002 Chiller-Etch Chambers (1) Ebara ESR20N dry pump, loadlock/xfer mod
Extended Description	Details at NE7800_BK1_CHP02.pdf
Power Requirements	208 V     220.0 A     60 Hz     3 Phase
Year of Manufacture	2008
Condition	Like New

Shipping & Handling:

Unless otherwise stated, all items are fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

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