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in Barrel/Box Plasma Etchers
Item ID: 108528

Offered1 Offered at Best Price


Barrel Plasma Etcher with Vacuum Pump
March Instruments, manufacturer of plasma systems, was acquired by Nordson - called Nordson MARCH.

In addition to this March Instruments PM-600, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, Trion Technology

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

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Unit Price Unstated
Number of Units 1
Manufacturer March Instruments
Model PM-600
Etcher Type Barrel
Rated Power Output 300 Watts
Reactor Center Cylindrical
Reactor Center Size 
  Depth 12.00  in  (30.48 cm)
  Diameter 10.00  in  (25.40 cm)
Reactor Center Material Quartz
Number of Gas Inputs Two Gas
Automatching Network Included Yes
Vacuum Pump Included Yes
Vacuum Pump Model Varian SD-200
RF Generator Model Seren IPS R300
Accessories (1) Quartz Lattice Tray
Door with viewing window
Other Information Automatic and Manual Modes
Operating Frequency: 13.56 MHz
Power Requirements 115 V     60 Hz     1¬†Phase
Exterior Dimensions 
  Width 23.000  in  (58.4 cm)
  Depth 22.000  in  (55.9 cm)
  Height 17.000  in  (43.2 cm)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions