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in Single Chamber PECVD Tools
Item ID: 11074

Offered1 Offered at Best Price


Low Temperature CVD Using ECR Technology. Formerly PlasmaQuest Astex

This system is designed for the fluorination of DLC surfaces on various substrates.
The ECR zone is produced by a Nd-Fe-B permanent magnet which produces a high magnetic field launch of the microwave energy.
High magnetic field launch produces a highly stable and efficient ECR plasma.

Nexx Systems Cirrus 300

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Unit Price Unstated
Number of Units 1
Manufacturer Nexx Systems
Model Cirrus 300
Description CVD Deposition with ECR source
Wafer Size Range 
  Minimum 50 mm
  Maximum 300 mm
Controller Type PC Controller Type
  Loadlock Yes/No YES
High Vacuum Pump Balzers TMH 1001corrosive service Turbo
Automatch Text ASTeX AX3060
  Number of Chillers 1
  Chiller #1Manufacturer/Model Neslab - HX 75
Other Information PQ2000 Series permanent magnet low profile ECR source.
ASTeX AX2110 microwave power supply with remote magnetron head.
  • Output 150 - 1000 Watt, PC controlled
    20 inch outer diameter reactor chamber with Viton seals.
    Six (6) MKS Instruments 2179A Kalrez sealed mass flow controllers, expandable to seven.
    Wafer Chuck
  • Handling up to 300mm in diameter
  • RF Biased, Via RFPP 1kW, 13.56 Mhz, with automatch
  • Recirculating fluid cooling
  • Helium backside cooling
  • Temperature range -25C to 130C
  • Mechanical clamp substrate holder
  • NB: Higher temperatures can be achieved without helium backside cooling
  • Operating Air Pressure 80.00  PSI  (551,624.00 N/sq m)
    Year of Manufacture 2000
    Condition Excellent
    Exterior Dimensions 
      Width 81.000  in  (205.7 cm)
      Depth 41.000  in  (104.1 cm)
      Height 85.000  in  (215.9 cm)

    Shipping & Handling:

    Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
    Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
    Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
    Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
    CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
    Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

    Minimum order of $50 required.
    We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
    All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
    All other sales, including foreign sales, are prepayment only.
    MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

    Domestic Terms and Conditions

    International Terms and Conditions