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in Barrel/Box Plasma Etchers
Item ID: 114961

Offered1 Offered at Best Price


Plasma Treatment System

Advanced Plasma Systems and March Instruments, manufacturer of plasma systems, were aquired by Nordson.
Both companies merged and are an entity of Nordson - now called Nordson MARCH.

In addition to this Advanced Plasma System, Inc. B Series-4, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, Trion Technology

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

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Unit Price Unstated
Number of Units 1
Manufacturer Advanced Plasma Syst
Model B Series-4
Etcher Type Box
Rated Power Output 5000 Watts
Reactor Center Rectangular
Reactor Center Size 
  Width 30.00  in  (76.20 cm)
  Depth 30.00  in  (76.20 cm)
  Height 36.00  in  (91.44 cm)
Reactor Center Material Aluminum
Number of Gas Inputs Three Gas
Vacuum Pump Included Yes
Vacuum Pump Model Stokes Blower 615-2 with Stokes 149-11 pump
RF Generator Model Advanced Energy PEII 5K
Panel Meters Digital
External Cooling Water Cooled
Accessories Gas Delivery: (3) MKS MFCs, 2000 SCCM each
MKS 947 vacuum gauge
Stokes oil fiter: Model LFI1K3HPXG874
Thermal Transfer Products heat exchanger: Model AW-25-80759
Viewing window
Other Information Four shelves: Shelf size 21.375 x 27.25"
Power Requirements 208 V     100.0 A     60 Hz     3¬†Phase
Year of Manufacture 2000
Exterior Dimensions 
  Width 86.000  in  (218.4 cm)
  Depth 38.000  in  (96.5 cm)
  Height 83.000  in  (210.8 cm)
Weight 2,146  lb  (973 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions