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FULL DESCRIPTION of Item 124315

in Metal Etchers
Item ID: 124315

Offered1 Offered at Best Price


PLASMATHERM REACTIVE ION ETCH SYSTEM 11"

Reactive Ion Etch System - 11" Electrode

In addition to this Plasma-Therm 790 11" RIE, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

PLASMATHERM REACTIVE ION ETCH SYSTEM 11"
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Unit Price Unstated
Number of Units 1
Manufacturer Plasma-Therm
Model 790 11" RIE
Wafer Size Range 
  Minimum 50 mm
  Maximum 200 mm
Process Reactive Ion Etch System
Controller Type PC Controller Type
High Vacuum Pump Leybold 361C
RF Generator Model RFPP 5S
Number of Gas Inputs Four Gas
Process Gases SF6, O2,CF4,Ar
Chillers 
  Number of Chillers 0
Accessories 
  • (4)MKS Model 1160 MFCs, (3)100sccm,(1)50sccm
  • 290 MKS ion gauge controller
Other Information Refurbishment to Include:
Wet Clean of gas shower and chamber
Service of throttle valve
Replacement of viewing windows
Power Requirements 208 V     60 Hz     3¬†Phase
Year of Manufacture 1993
Exterior Dimensions 
  Width 24.000  in  (61.0 cm)
  Depth 40.000  in  (101.6 cm)
  Height 69.000  in  (175.3 cm)
Weight 604  lb  (274 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
 
Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions