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in Other Lithography Exposure Tools
Item ID: 135336

Offered1 Offered at Best Price


Large Area Lithography System
Zeiss 5X 29 mm diameter 0.20na lens.

Interserv Technologies 1400
Unit Price Unstated
Number of Units 1
Manufacturer Interserv Technologi
Model 1400
Controller Type PC Controller Type
Refurbished YES
Other Information Specifications:
  • Maximum Travel: 14” x 14” 355mm x 355mm
  • Accuracy: 5.0 parts per million
  • Stepping Repeatability (Precision): ±0.25 micron (2 Sigma)
  • Interferometer Least Count: 0.005 micron (Lambda/128)
  • Orthogonality: 90° ±1.0 arc second
  • Programmable Resolution: 0.01 micron
  • Type: Automatic Air Gage
  • Repeatability: ±0.25 micron
  • Reduction Ratio: 1/5X ± 0.003%
  • Field Diameter: 29 mm
  • Wavelength G-line: (436 nm)
  • Numerical Aperture: 0.20
  • Maximum Image Field: 20 mm x 20 mm
  • Working Resolution: 1.75 micron
  • Maximum Full-Field Distortion: ± 0.3
  • Illuminator Up to 1000 Watts
  • Uniformity of Illumination: ±3% at the image plane
    Manual Load/Unload:
  • Sizes: 10 x 12 inch x 1.1mm
  • Wedge & Flat Dimension Per SEMI Specifications
    Automatic Reticle Handling
  • Capacity: 4 Reticle Carousel
  • Reticle Size: 5” x 5” x 0.090”
  • Reticle Edge Masking Accuracy: ±1.0 mm
  • Rotational Precision: ±0.8 arc second
  • Full-Field Pellicle Handling: 6mm Standoff Top and Bottom
    Substrate To-Reticle Alignment
  • Type: Through the reticle and reduction lens
  • Viewing System Central control monitor
  • Layer-to-Layer: ±0.5 micron (2 Sigma)
  • Weight 5,400  lb  (2,449 kg)

    Shipping & Handling:

    Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
    Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
    Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
    Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
    CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
    Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

    Minimum order of $50 required.
    We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
    All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
    All other sales, including foreign sales, are prepayment only.
    MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

    Domestic Terms and Conditions

    International Terms and Conditions