Item ID: 135336
1 Offered at Best Price
INTERSERV TECHNOLOGIES LARGE AREA LITHOGRAPHY SYSTEM
Large Area Lithography System Zeiss 5X 29 mm diameter 0.20na lens.
Number of Units
Manufacturer Interserv Technologi
Controller Type PC Controller Type
Other Information Specifications: Stage:
Maximum Travel: 14” x 14” 355mm x 355mm
Accuracy: 5.0 parts per million
Stepping Repeatability (Precision): ±0.25 micron (2 Sigma)
Interferometer Least Count: 0.005 micron (Lambda/128)
Orthogonality: 90° ±1.0 arc second
Programmable Resolution: 0.01 micron Focus:
Type: Automatic Air Gage
Repeatability: ±0.25 micron Lens:
Reduction Ratio: 1/5X ± 0.003%
Field Diameter: 29 mm
Wavelength G-line: (436 nm)
Numerical Aperture: 0.20
Maximum Image Field: 20 mm x 20 mm
Working Resolution: 1.75 micron
Maximum Full-Field Distortion: ± 0.3 Illumination:
Illuminator Up to 1000 Watts
Uniformity of Illumination: ±3% at the image plane Manual Load/Unload:
Sizes: 10 x 12 inch x 1.1mm
Wedge & Flat Dimension Per SEMI Specifications Automatic Reticle Handling
Capacity: 4 Reticle Carousel
Reticle Size: 5” x 5” x 0.090”
Reticle Edge Masking Accuracy: ±1.0 mm
Rotational Precision: ±0.8 arc second
Full-Field Pellicle Handling: 6mm Standoff Top and Bottom Substrate To-Reticle Alignment
Type: Through the reticle and reduction lens
Viewing System Central control monitor
Layer-to-Layer: ±0.5 micron (2 Sigma)
Weight 5,400 lb (2,449 kg)
Shipping & Handling:Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
Payment:Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.
Domestic Terms and Conditions
International Terms and Conditions
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