Serving  Our Guest    
ALL CATEGORIES   Semiconductor Mfg Eq   Wafer Fabrication Eq   Chemical Vapor Dep   PECVD Tools   Production Tools    View LISTINGS    Search-by-Specs   


in Single Chamber PECVD Tools
Item ID: 147470

Offered1 Offered at Best Price


Refurbished PECVD System with 11" Electrode
Unit Price Unstated
Number of Units 1
Manufacturer Plasma-Therm
Model 790 PECVD 11"
Description PECVD Single Chamber 11" Electrode
Controller Type PC Controller Type
High Vacuum Pump None
Roughing Pump None
RF Generator Model RFPP 5S
Number of Gas Inputs Six Gas
Process Gases SF6, Ammonia, Nitrogen
  Number of Chillers 0
Accessories Resistive heated lower electrode up to 350 C, watlow temperature controller
Cooling/heating circuit in chamber walls
MKS throttle valve pressure control
VAT Al body gate valve assembly--ISO 100
2 torr manometer
Windows 98 Operating System
Process Gases--All MFCs will be cleaned and calibrated to NIST standards:
  • 2-N2 500sccm
  • 2-N2 1000sccm
  • 1-SF6 50sccm
  • 1-Ammonia 20sccm
Operating manuals and related documentation included.
Vacuum pump and chiller are not included.

Other Information 
Refurbishment to Include and not Limited to:
  • Wet Clean of gas shower and process chamber
  • Cleaning and recalibration of MFCs is NOT included
  • Service of throttle and gate valves
  • Replacement of viewing windows
Power Requirements 208 V     60 Hz     3¬†Phase
Year of Manufacture 1998
Exterior Dimensions 
  Width 24.000  in  (61.0 cm)
  Depth 40.000  in  (101.6 cm)
  Height 69.000  in  (175.3 cm)
Weight 604  lb  (274 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions