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in Single Chamber PECVD Tools
Item ID: 181540

Offered1 Offered at Best Price


PECVD TEOS Tool with Load Lock
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Unit Price Unstated
Number of Units 1
Manufacturer Oxford Instruments
Model Plasmalab System 100
Description PECVD TEOS with Load Lock
Wafer Size Range 
  Maximum 200 mm
Process PECVD & TEOS
Controller Type PC Controller Type
  Loadlock Yes/No YES
  Loadlock Pump Manufacturer & Model Alcatel APT 80 Turbo, ACT 200T Controller
RF Generator Model AE LF5 & AE RFX 600A
Automatch Text Oxford Instruments
Number of Gas Inputs Ten Gas
Process Gases See Below
Other Information Advanced Energy LF-5--RF Generator
Advanced Energy RFX 600A--RF Generator
Process Gases
  CF4 80%, O2 20%--500 SCCM---MKS 1179A
  Ar 90%, PH3 10%--50 SCCM---MKS 1479A
  Ar 90%, GeH4 10%--50 SCCM---MKS 1479A
  Ar 90%, BeH6 10%--50 SCCM---MKS 1479A
  N2 95%, SiH4 5%--1 SLM---MKS 1479A
  NH3 100%--100 SCCM---MKS 1479A
  N2O 100%--3 SLM---MKS 1179A
  N2O 100%--200 SCCM  MKS 1179A
  N2 100%--2 SLM MKS 1179A
  O2 100%--500 SCCM MKS 1179A

Refurbishment to include but not limited to the following;
  Cleaning and recalibration of MFCs
  Inplace wet cleaning.  As option chamber and associated harware can be sent high     purity cleaning.

System will be fully functional and source inspection to be performed at our facility with inert gases

Power Requirements 208 V     25.6 A     50/60 Hz     3¬†Phase
CE Marked YES
Year of Manufacture 2001

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions