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in Metal Etchers
Item ID: 181705

Offered1 Offered at Best Price


Table Top Reactive Ion Etch System

March Jupiter 3

In addition to this March Instruments Jupiter III, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

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Unit Price Unstated
Number of Units 1
Manufacturer March Instruments
Model Jupiter III
Wafer Size Range 
  Maximum 200 mm
Process RIE
Controller Type Microprocessor Controller Type
RF Generator Model Internal 300 Watt
Number of Gas Inputs Two Gas
Accessories Alcatel 2015 C2, 11 CFM Mechanical Vacuum Pump
Other Information RF Generator
  0-300 watt
  13.56 MHZ
  Automatic or manual impedance matching

Anodized Aluminum chamber
Chamber dimensions: 10" diameter x 1.5" high

Two Process Gas Inputs--Flow Meter Controller

Extended Description Details at March Jupiter 3 Description.pdf
Power Requirements 110 V     10.0 A     50/60 Hz     1¬†Phase
Exterior Dimensions 
  Width 13.000  in  (33.0 cm)
  Depth 18.000  in  (45.7 cm)
  Height 16.000  in  (40.6 cm)
Weight 80  lb  (36 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions