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in Horizontal Sputterers
Item ID: 22276

Offered1 Offered at Best Price


Sputtering System

In addition to this CHA Industries SSC 1000, Capovani Brothers Inc. stocks a variety of other used and refurbished Thin Film Deposition tools including Sputtering, Electron Beam Evaporators (E Beam) and Thermal Evaporators (Resistive Evaporators). Typical manufactures include Airco Temescal, Applied Materials, CHA Industries, CVC, Denton, Dynavac, Edwards, Leybold, Oerlikon, Temescal, Varian, Veeco Instruments and VonArdenne.

To view our complete stock of used physical vapor deposition, visit our Physical Vapor Deposition Equipmetn Category.

Learn more about our Physical Vapor Deposition (PVD) Equipment Refurbishment and Functional Testing Procedures

This used sputtering system and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus equipment list

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Unit Price Unstated
Number of Units 1
Manufacturer CHA Industries
Model SSC 1000
Description Sputtering System
Other Information System Specifications
  • Combination high-vac valve,trap and pump
  • Micrometer adjustable,variable orifice throttle valve
  • CTI ON Board 10 cryopump with 9600 compressor(water cooled)
  • CTI On Board auto regeneration control
  • Edwards E2M80 mechanical pump
  • Mass-Vac Posi-Trap model 345040 molecular sieve trap
  • Soft vent
  • Soft roughing
  • Vacuum manifolding
  • Granville-Phillips model 307 ion gauge control
  • 28.5" diameter by 16" tall deposition chamber
  • 29" Diameter process/source chamber mounting plates
  • Source plate has two blank off plates for unused 8" source positions
  • Upper mounting plate for cathode,heater array and lower plate for fixturing
  • Upper and lower plate hoists
  • Motorized hoists with adjustable limit switches
  • Flag shutter
  • Advanced Energy 3KW RF sputter power supply
  • Heater array/Heater power supply for high pressure operation
  • (1) Magnetron Cathode: 8 inch
  • Inficon IC 5 rate and thickness deposition controller,configured for time/power control with 3.5" floppy disc drive intergrated for control of the shutter and sputter power supply.
    Mass flow gas control (02/Ar)
  • MKS model 247 power supply/readout
  • Two model 2179 mass flow controlers with positive shutoff valves
  • MKS model 250 pressure controler
  • MKS model 627 pressure transducer
  • Industrial grade Siemens PC, 64MB RAM,10.4" TFT color monitor
  • Windows NT 4.0 WONDERWARE software
  • Controls multi layer,sequential process intergrating the operation,all the controls and power supplies
  • Manual vent switch
  • Roughing over-time and chamber over pressure interlocks
Power Requirements 120/208 V     100.0 A     60 Hz     3¬†Phase
Year of Manufacture 2000
Condition Excellent
Exterior Dimensions 
  Width 69.000  in  (175.3 cm)
  Depth 54.000  in  (137.2 cm)
  Height 97.000  in  (246.4 cm)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions