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in Standalone Sputterers
Item ID: 2667

Offered1 Offered at Best Price


High Performance Vacuum Coater System

Basic system consists of a 6" diffusion pump, valve-trap module, all
electrical controls and gauging, 25 1/2" diameter x 30" high stainless steel
bell jar, and a 26" stainless steel baseplate, all mounted in a functionally
designed, low profile equipment cabinet.

In addition to this Varian 3118, Capovani Brothers Inc. stocks a variety of other used and refurbished Thin Film Deposition tools including Sputtering, Electron Beam Evaporators (E Beam) and Thermal Evaporators (Resistive Evaporators). Typical manufactures include Airco Temescal, Applied Materials, CHA Industries, CVC, Denton, Dynavac, Edwards, Leybold, Oerlikon, Temescal, Varian, Veeco Instruments and VonArdenne.

To view our complete stock of used physical vapor deposition equipment, visit our Physical Vapor Deposition Equipment Category.

Learn more about our Physical Vapor Deposition (PVD) Equipment Refurbishment and Functional Testing Procedures

This used sputtering system and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus equipment list

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Location: Scotia, NY, United States
Unit Price Unstated
Number of Units 1
Manufacturer Varian
Model 3118
Description Sputtering System
Vacuum System Diffusion Pumped
Vacuum System Varian VHS-6 Diffusion pump
  • With 8.4 liter LN2 reservoir
  • Pumping speed: 2400 l/s air
  • Maximum throughput (at 1E-2 Torr): 4 Torr l/s
  • Operating range: 1E-3 to < 5E-9 Torr
  • Fluid Charge: 500 ml
  • Power: 2200 watts
  • 1 ph, 50/60 Hz, 115/208/240 VAC
  • System may be upgraded with CTI CryoTorr-8 package
      (add $12,500)

    Compatible re-built roughing pump also included

  • Load Lock Included No
    Target Size 5"
    Quantity of DC Cathodes 1
    Gas Inputs Two
    Gas Input Control None
    Substrate Heaters No
    Residual Gas Analyzer No
    DC Power Supply 
      Manufacturer Varian
      Model S-Gun Power Control (980-2084)
      Output Power 7.00 kW DC
    Other Information System includes:
  • Inficon XTC/2 Deposition Controller
  • Varian 845 Vacuum Ionization Gauge Controller
  • Varian S-Gun Sputterer
  • Three 16 3/4" perforated dome planetaries
  • 25 1/2" stainless steel bell jar with electric hoist
  • Six 2 3/4" and three 4 1/2" conflat feedthroughs in collar
  • Fifteen 1" feedthroughs in base plate
  • 4" viewing window in bell jar
  • Power Requirements 208 V     30.0 A     60 Hz     3 Phase
    Condition Excellent
    Exterior Dimensions 
      Width 54.000  in  (137.2 cm)
      Depth 40.000  in  (101.6 cm)
      Height 92.000  in  (233.7 cm)
    Weight 1,227  lb  (557 kg)

    Shipping & Handling:

    Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
    Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
    Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
    Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
    CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
    Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

    We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
    All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
    All other sales, including foreign sales, are prepayment only.
    MasterCard, VISA, and Discover Card are accepted.