Item ID: 3011

**1 Offered at Best Price**

PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM

Dual Plasma Etch and Reactive
Ion Etch Processing Systems

System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

In addition to this Plasma-Therm Wafer Batch 740/740, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

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PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM

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Location: Scotia, New York, United States

Unit Price	Unstated
Number of Units	1
Manufacturer	Plasma-Therm
Model	Wafer Batch 740/740
Wafer Size Range
Minimum	100 mm
Maximum	200 mm
Process	Plasma and Reactive Ion Etch
Controller Type	Microprocessor Controller Type
End Point Detection	Included
High Vacuum Pump	Leybold 361C
Roughing Pump	Ebara A10S
RF Generator Model	None
Number of Gas Inputs	Four Gas
Chillers
Number of Chillers	1
Chiller #1Manufacturer/Model	Tek-Temp MM1500/3000
Other Information	Refurbishment to include the following: Control Upgrade: Our operating system upgrade has been developed as a direct replacement control system for PlasmaTherm process tools using off-the-shelf IO components and modern Windows Vista compatible control system software. A complete replacement of all IO and signal wiring is performed. None of the original IO is used. A full set of system documentation is provided which includes wiring diagrams, IO listings, OEM equipment spec sheets, and full system software source code. MFCs will be sent out for cleaning and recalibration; filters will be replaced. Wet clean of process chambers. Installation of rebuilt Leybold 361C turbo pump and controller. NB: Please note that the dual chamber configuration is designed to operate sequentially. The RF generator and vacuum sources are shared for each process chamber. However each chamber has its own set of four MFCs.
Exterior Dimensions
Width	45.000 in (114.3 cm)
Depth	43.000 in (109.2 cm)
Height	73.000 in (185.4 cm)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions

FULL DESCRIPTION of Item 3011

1 Offered at Best Price

PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM

**1 Offered at Best Price**