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FULL DESCRIPTION of Item 30246

in Cluster PECVD Tools
Item ID: 30246

Offered1 Offered at Best Price


PLASMATHERM VLR 700

Single Chamber PECVD. Mixed Frequency Deposition
(MFD) Both High Frequency (13.56 MHz) and Low Frequency (50-460 kHz)
RF power delivered both electrodes.
PLASMATHERM VLR 700
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Unit Price Unstated
Number of Units 1
Manufacturer Plasma-Therm
Model VLR 700 VLR-PM1-ICRB-PM
Wafer Size Range 
  Minimum 50 mm
  Maximum 200 mm
  Set Size 100 mm
Number of Chambers 1
Process Capabilities Nitride Depostion
Chamber 1 Description 13.5" Electrode
Gas Delivery
  • Six Channel; (2)2000 sccm, (2)1000 sccm, (1)200 sccm, (1)20 sccm
  • Controller Type PC Controller Type
    Temperature Control T/C
    External Cooling Water Cooled
    Accessories Leybold Pump Package
    Neslab HX 75 Chiller
    Other Information Computer #1 dual boot VxWorks Wind River Systems 5.3.1 BSP version 1.1/1 and
    Windows 3.11 System Monitor VLR v.1.10

    Computer #2 NT4, Versaworks 2.5

    Year of Manufacture 1999
    Condition Excellent

    Shipping & Handling:

    Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
    Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
    Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
    Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
    CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
    Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
     
    Payment:

    Minimum order of $50 required.
    We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
    All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
    All other sales, including foreign sales, are prepayment only.
    MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

    Domestic Terms and Conditions

    International Terms and Conditions