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FULL DESCRIPTION of Item 32264

in Standalone Sputterers
Item ID: 32264

Offered1 Offered at Best Price


VARIAN 3190 SPUTTER SYSTEM

Load locked single wafer sputter, cassette to cassette vertically mounted for sideways sputter

Currently configured for 100mm wafers
3 Target mini-quantums
RF Etch
VIPS (Vacuum Isolated Processing Station)
Residual Gas Analyzer

In addition to this Varian 3190, Capovani Brothers Inc. stocks a variety of other used and refurbished Thin Film Deposition tools including Sputtering, Electron Beam Evaporators (E Beam) and Thermal Evaporators (Resistive Evaporators). Typical manufactures include Airco Temescal, Applied Materials, CHA Industries, CVC, Denton, Dynavac, Edwards, Leybold, Oerlikon, Temescal, Varian, Veeco Instruments and VonArdenne.

To view our complete stock of used physical vapor deposition equipment, visit our Physical Vapor Deposition Equipment Category.

Learn more about our Physical Vapor Deposition (PVD) Equipment Refurbishment and Functional Testing Procedures

This used sputtering system and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus equipment list

VARIAN 3190 SPUTTER SYSTEM
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Unit Price Unstated
Number of Units 1
Manufacturer Varian
Model 3190
Description Single Wafer Vertical Sputter System
Vacuum System Cryo Pumped
Load Lock Included Yes
Number of RF Etch Cathodes 1
Substrate Heaters Yes
Residual Gas Analyzer Yes
DC Power Supply 
  Output Power 12.00 kW DC
RF Generator 
  Rated Power Output 1000 Watts
  Matching Network Yes
Power Requirements 480 V     22.0 A     60 Hz     3¬†Phase

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
 
Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions