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Item ID: 37447

Offered1 Offered at Best Price


Excimer VUV/03 Cleaning Unit
UV Cleaning

  • Enhancement of wetability and adhesion of photoresist
  • Enhancement of wetability of SOG
  • Cleaning before deposition process
  • Soft ashing
  • High-speed removal of static electricity
  • Cleaning of reticles
  • Simple dry cleaning allows removal of most of organic matter
  • No charging damage
  • Instantaneous on/off operation suited to single-wafer process
  • Low-temperature process
  • Cleaning process can be performed under atmospheric air
  • USHIO SUS 55
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    Unit Price Unstated
    Number of Units 1
    Manufacturer USHIO, Inc.
    Model SUS 55
    Description Excimer VUV/03 Cleaning Unit
    Lamp Type & Power Ultra-Violet/ 3 required
    Wavelength Maximum 172 nm
    Interface Other
    External Cooling Water Cooled
    Other Information Lamp House Model HO237:
    Lamp house has vacuum flange attached
    Flange O.D.: 300 mm
    Flange I.D.: 170 mm
    Window size: 170 mm dia.
    O Ring groove: 240 mm
    Bolt circle: 270 mm x 8 holes x 12 mm
    Water cooled
    Lamp house dimensions: 300W x 404D x 220H mm
    Power Supply Model B0035B
    Lamp hour meter
    External interface connector
    Power Requirements 110 V     50/60 Hz     1¬†Phase
    Condition New-Never Used
    Weight 100  lb  (45 kg)

    Shipping & Handling:

    Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
    Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
    Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
    Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
    CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
    Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

    Minimum order of $50 required.
    We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
    All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
    All other sales, including foreign sales, are prepayment only.
    MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

    Domestic Terms and Conditions

    International Terms and Conditions