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FULL DESCRIPTION of Item 4054

in Metal Etchers
Item ID: 4054

Offered1 Offered at Best Price


PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM

Combination PECVD and Dual
Plasma Etch/Reactive Ion Etch
Processing Systems

In addition to this Plasma-Therm 73/74, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM
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Unit Price Unstated
Number of Units 1
Manufacturer Plasma-Therm
Model 73/74
Wafer Size Range 
  Maximum 200 mm
Process PECVD/Plasma Etch/Reactive Ion Etch
Controller Type Microprocessor Controller Type
Interface I/O Port
Roughing Pump RUVAC WSU 251
Number of Gas Inputs Eight Gas
Other Information System Features:
  • RF Plasma RF-5 generator
  • MKS Type 252A exhaust valve controller
  • Watlow Series 808 electric heater control
  • RF Plasma AM-5 Automatching network (700)
  • Leybold WSU251/D65BCS roots pumping system
  • Tek-Temp TKD100/4000 chiller
  • Brooks 5850E Mass Flow Controllers:
    Etch: N2(100 sccm),CHF3(200 sccm), Cl2(100 sccm), BCl3(100 sccm)
    Dep: N2(2000 sccm),N2(2000 sccm),N2(2000 sccm), NH3(sccm)
  • Exterior Dimensions 
      Width 47.000  in  (119.4 cm)
      Depth 39.000  in  (99.1 cm)
      Height 66.000  in  (167.6 cm)

    Shipping & Handling:

    Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
    Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
    Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
    Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
    CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
    Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
     
    Payment:

    Minimum order of $50 required.
    We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
    All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
    All other sales, including foreign sales, are prepayment only.
    MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

    Domestic Terms and Conditions

    International Terms and Conditions