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in Automated Coating and Developing Cluster System
Item ID: 42129

Offered1 Offered at Best Price


SUSS Gamma 60 Coating and Developing Cluster Tool

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Unit Price Unstated
Number of Units 1
Manufacturer Suss Microtec
Model GAMMA 60
Wafer Size Range 
  Minimum 50 mm
  Maximum 150 mm
  Set Size 75 mm
Number of Photoresist Develop Stations 1
Number of Photoresist Dispenses 3
Number of Developer Dispensers 3
Number of Developer Rinse Dispensers 2
Number of Vapor Prime Hot Plates 1
Number of Hot Plates 2
Number of Chill Plates 1
Number of Cassette Elevators 3
Wafer Edge Bead Removal YES
Wafer Backside Rinse YES
Wafer Handling Standard Robot
Accessories (2) Julabo Model F25 Chillers
Other Information System currently for both 2" and 3" substrates. Genmark Model GENCOBOT IV

Power requirements: 400V, 3 phase, 50/60 Hz. NB: Transformer can be fitted to customer required voltage.
Year of Manufacture 2001
Condition Excellent
Exterior Dimensions 
  Width 50.984  in  (129.5 cm)
  Depth 68.307  in  (173.5 cm)
  Height 74.606  in  (189.5 cm)
Weight 1,800  lb  (816 kg)
CE Marked YES

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions