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FULL DESCRIPTION of Item 45428

in Poly/Nitride Etchers
Item ID: 45428

Offered1 Offered at Best Price


PLASMATHERM ICP PLASMA ETCHER

Inductively Coupled Plasma Etcher with 9.5 Inch Electrode

In addition to this Plasma-Therm 790 ICP, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

PLASMATHERM ICP PLASMA ETCHER
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Unit Price Unstated
Number of Units 1
Manufacturer Plasma-Therm
Model 790 ICP
Wafer Size Range 
  Minimum 50 mm
  Maximum 200 mm
Controller Type PC Controller Type
High Vacuum Pump Leybold 361C
Roughing Pump Leybold D40BCS
RF Generator Model RFPP RF20M & RF5S
Automatch Text RFPP AM-20 & AM-5
Number of Gas Inputs Three Gas
Process Gases TBD
Other Information The top coil is supplied 2 MHz RF at 1000 watt max. RFPP Model RF20M
The bottom electrode is supplied 13.56 MHz RF at 500 Watts. RFPP Model RF5S

Refurbishment to Include:
Cleaning and recalibration of mass flow controllers.
Rebuilding of Leybold D40BCS prepped only with fomblin oil.
Rebuilding of Leybold 361C Turbo pump.
Cleaning of chamber and gas shower.
Power Requirements 208 V     60.0 A     60 Hz     3¬†Phase
Year of Manufacture 1998
Refurbished YES

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
 
Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions