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in Standalone Sputterers
Item ID: 50779

Offered1 Offered at Best Price


Three 8" DC Magnetron/Diode electrodes, One 2.5cm Ion Source

In addition to this Consolidated Vacuum Corp AST-304, Capovani Brothers Inc. stocks a variety of other used and refurbished Thin Film Deposition tools including Sputtering, Electron Beam Evaporators (E Beam) and Thermal Evaporators (Resistive Evaporators). Typical manufactures include Airco Temescal, Applied Materials, CHA Industries, CVC, Denton, Dynavac, Edwards, Leybold, Oerlikon, Temescal, Varian, Veeco Instruments and VonArdenne.

To view our complete stock of used physical vapor deposition equipment, visit our Physical Vapor Deposition Equipment Category.

Learn more about our Physical Vapor Deposition (PVD) Equipment Refurbishment and Functional Testing Procedures

This used sputtering system and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus equipment list

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Unit Price Unstated
Number of Units 1
Manufacturer CVC
Model AST-304
Description Sputtering--Ion Etch
Vacuum System Cryo Pumped
Vacuum System CTI Cryogenics Cryotorr 8
CTI Cryogenics 8200 compressor
Leybold D65B mechanical pump
Load Lock Included No
Number of Cathodes Three
Target Size 8 Inch
Quantity of DC Cathodes 3
Substrate Heaters No
Residual Gas Analyzer No
DC Power Supply 
  Manufacturer CVC
  Output Power 3.00 kW DC
Accessories Ion Source
  • Ion Tech Type B94AL Ion Source
  • Max. beam output: 10mA
  • Normal accelerating voltage: 1.0 - 4.5 kV
  • Max. accelerating voltage: 8kV
  • Max. electron current: 200mA
  • Max. power input: 800W continuous
  • Typical beam current: close to 100% neutrals
  • Commonwealth Scientific IBS power supply/controller.
  • Other Information Chamber
  • 25" diameter with (3) 2" conflat ports.
  • (5) feed through holes in baseplate.
  • Manual throttle valve below baseplate.
  • (6) 7" diameter planetary stations are mounted on baseplate. Each flat substrate holder is located with 2 pins for ease of removal.
  • The planetary system may rotate up to 20 RPM with individual planets revolving at various speeds about their own axis.
  • The planetary system can be static with each planet rotating about its own axis.
  • A manual shutter provides a means of sputter cleaning, ion etching and selective sputtering.
  • Complete set of shielding included--not photographed.
  • Power Requirements 208 V     50.0 A     60 Hz     3¬†Phase
    Weight 820  lb  (372 kg)

    Shipping & Handling:

    Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
    Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
    Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
    Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
    CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
    Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

    Minimum order of $50 required.
    We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
    All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
    All other sales, including foreign sales, are prepayment only.
    MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

    Domestic Terms and Conditions

    International Terms and Conditions