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Item ID: 63666

Offered2 Offered at Best Price


Chemical Downstream Plasma Source

Applied Materials part number: 3750-0112
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Unit Price Unstated
Number of Units 2
Manufacturer Astex
Model AX 7610
Description Chemical Downstream Plasma Source
Other Information The AX7610 is a microwave plasma source for downstream chemical etch applications,
such as photoresist stripping and hard mask removal.
With replaceable quartz or sapphire tubes, the AX7610 downstream source offers flexibility of configuration to meet the most demanding application process parameters.
The sapphire tube version is compatible with much more severe CF4 and NF3 chemistries for isotopic etch and other applications.

Sapphire Plasma Source Tube
P/N F120101
Applied part number: 3750-0112
Max power output: 3 kW
Inert gas fitting: 1/4" VCR
Output flange: KF 40
Operating pressure: 2 to 8 Torr
Elect requirments: 24VDC 1 Amp
Process gas compatibility:
O2, N2, H2O, Ar, NF3, CF4, F6, and other Florine based gases

Exterior Dimensions 
  Width 8.000  in  (20.3 cm)
  Depth 4.500  in  (11.4 cm)
  Height 14.500  in  (36.8 cm)
Weight 10  lb  (5 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions