Serving  Our Guest    
ALL CATEGORIES   Semiconductor Mfg Eq   Wafer Fabrication Eq   Plasma Processing Eq   Plasma Etch Eq   Parallel Pl Tools   Single Chamber Tools    View LISTINGS    Search-by-Specs   


in Poly/Nitride Etchers
Item ID: 90316

Offered1 Offered at Best Price


8" Polysilicon Etch Tool

In addition to this LAM Research Corp. 4420, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

  Click to see additional image(s)... other images

Location: Scotia, NY, United States
Unit Price Unstated
Number of Units 1
Manufacturer LAM Research Corp.
Model 4420
Wafer Size Range 
  Set Size 200 mm
Process Polysilicon Etch
Software Revision Level 2.2
End Point Detection Photodiode 405 and 520
RF Generator Model 1350 MHz Minimatching
Number of Gas Inputs Eight Gas
Process Gases CL2, Ar, O2, CF4, He, CHF3, SF6
Other Information Electrode Cap Thin Edge Lam P/N 715-011629-008
Hine 38A Indexers
Orbitally Welded Gas Box
Heated Pumping Manifold
Remote AC Box
Onboard RF Generators 1350 MHz Minimatching top & bottom
Power Requirements 208 V     30.0 A     50-440 Hz     3¬†Phase
CE Marked YES
Exterior Dimensions 
  Width 48.000  in  (121.9 cm)
  Depth 64.000  in  (162.6 cm)
  Height 68.500  in  (174.0 cm)
Weight 1,818  lb  (825 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions