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Single Chamber PECVD Tools


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Item IDPhotoItem DescriptionSize RangeCass to CassLoadlock#PriceNotes
MakeModelSet SizeLoadlock Y/N
$
11074 Nexx Systems Cirrus 300YES 1 F*
181540 Oxford Instruments Plasmalab System 100YES 1 F*
147470 Plasma-Therm 790 PECVD 11" 1 F*

NOTE:
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   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.
Items from the following manufacturers are offered under Single Chamber PECVD Tools:
Nexx Systems, Oxford Instruments, Plasma-Therm