Metal Etchers

List other sub-categories under Single Chamber Plasma Tools

Show other product types under Single Chamber Plasma Tools

	Item ID	Item Description		Wafer Size Range		Process	#		Price	Notes
		Make	Model	Max	Set Size
									$
	4054	Plasma-Therm	73/74	200 mm		PECVD/Plasma Etch/Reactive Ion Etch	1
	45430	Plasma-Therm	790 11 RIE	200 mm		Reactive Ion Etch System	1
	124315	Plasma-Therm	790 11" RIE	200 mm		Reactive Ion Etch System	1			F*
	206582	Plasma-Therm	BT 6" RIE MF	150 mm		Reactive Ion Etch System	1
	50854	Plasma-Therm	VII 734	200 mm		RIE/Plasma Deposition	1			F*
	11919	Plasma-Therm	VII 734MF	200 mm		RIE/Plasma Etch	1			F*
	3011	Plasma-Therm	Wafer Batch 740/740	200 mm		Plasma and Reactive Ion Etch	1
	184779	Technics	Micro Stripper -- Series 200	100 mm		Plasma etch	1			F*

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.