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Single Chamber PECVD Tools in Single Chamber PECVD ToolsSingle Chamber PECVD Tools (2)

 

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APPLIED MATERIALS P5000 MARK II SYSTEM

APPLIED MATERIALS P5000 MARK II SYSTEM


AMAT P5000 Mark II Hybrid System.
Two MxP Etch Chambers, One PECVD Nitride Chamber. Phase III handling system. 28-line onboard gas panel.
Integrated endpoint system with 2 monochromators.
Currently configured for 100mm wafers.

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Items from the following manufacturers are offered under Production Tools:
Applied Materials, Inc., Nexx Systems, Plasma-Therm