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Item ID  Photo Short Description Product Type / Details # Price Notes Make Model   $   49690 Advanced Energy   Advanced Energy   ATX-600  Radio Frequency (RF) Generators in Power Supplies ADVANCED ENERGY IMPEDANCE MATCHING NETWORK CONTROLLER: Controller for Impedance Matching Network Controller for the Advanced Energy Impedance Matching Network. Matching network is not available. 1   F* 140340 Advanced Energy   Advanced Energy   Apex 3013  Radio Frequency (RF) Generators in Power Supplies ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY 3000 WATTS 13.56 MHZ: Radio Frequency Generator The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability. 2   F* 139488 Advanced Energy   Advanced Energy   PEII-10K  Radio Frequency (RF) Generators in Power Supplies ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY, 10000 WATT, 40 KHZ: Radio Frequency Generator Representative photo 10   F* 208186 Advanced Energy   Advanced Energy   PEII-10K  Radio Frequency (RF) Generators in Power Supplies ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY, 10000 WATT, 40 KHZ: Representative photo 1   F* 175885 Advanced Energy   Advanced Energy   3152522-001B / RAS Split Inductor  Radio Frequency (RF) Generators in Power Supplies ADVANCED ENERGY RAS SPLIT INDUCTOR: The RAS Split Inductor is designed for use with Advanced Energy PE or PEII 10 kW (or lower) power supply systems 1   F* 225628 Advanced Energy   Advanced Energy   PE 10K  Radio Frequency (RF) Generators in Power Supplies ADVANCED ENERGY REMOTE MINI-PANEL : PE 10K Remote Mini-Panel 1   1007 Advanced Energy   Advanced Energy   LF5  Radio Frequency (RF) Generators in Power Supplies ADVANCED ENERGY RF GENERATOR POWER SUPPLY : RF Generator w/Matching Network Formerly RF Power Products 3   190763 Advanced Energy   Advanced Energy   RF10S  Radio Frequency (RF) Generators in Power Supplies ADVANCED ENERGY RF GENERATOR POWER SUPPLY 1000 WATT 13.56 MHZ: Radio Frequency (RF) Generator  Power Supply Part No:  3150014-000 G4 SE 1   207153 Advanced Energy   Advanced Energy   Apex 1500/13  Radio Frequency (RF) Generators in Power Supplies ADVANCED ENERGY RF GENERATOR POWER SUPPLY 1500 W 13.56 HZ: Radio Frequency Generator 1   F* 42967 Advanced Energy   Advanced Energy   Apex 3513  Radio Frequency (RF) Generators in Power Supplies ADVANCED ENERGY RF GENERATOR POWER SUPPLY 3.5KW: Radio Frequency Generator The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability. 1   F* 3464 Advanced Energy   Advanced Energy   PDX9002V  Radio Frequency (RF) Generators in Power Supplies ADVANCED ENERGY RF PLASMA GENERATOR POWER SUPPLY 900W, 350 KHZ: RF Plasma Generator 2 2,600.00 F* 87948 Applied Materials   Applied Materials   8300  Oxide Etchers in Single Chamber Plasma Tools APPLIED MATERIALS CONTROLLER: Controller 1   87949 Applied Materials   Applied Materials   8300  Oxide Etchers in Single Chamber Plasma Tools APPLIED MATERIALS SYSTEM ELECTRONICS RACK: System Electronics Rack 1   114961 Advanced Plasma Syst   Advanced Plasma Syst   B Series-4  Barrel/Box Plasma Etchers in Plasma Etch Equipment APS MARCH B SERIES-4 PLASMA TREATMENT SYSTEM. : Plasma Treatment System Desmear/Etchback Advanced Plasma Systems and March Instruments, manufacturer of plasma systems, were aquired by Nordson. Both companies merged and are an entity of Nordson - now called Nordson MARCH. 1   F* 63666 Astex   Astex   AX 7610  Plasma Processing Equipment and Tools - Other in Plasma Processing Equipment ASTEX CHEMICAL DOWNSTREAM PLASMA SOURCE: Chemical Downstream Plasma Source Applied Materials part number: 3750-0112 2   206579 Astex   Astex   SXRHA  Radio Frequency (RF) Generators in Power Supplies ASTEX MAGNETRON HEAD: Magnetron Head 2   85963 Astex   Astex   AX3041  Plasma Processing Equipment and Tools - Other in Plasma Processing Equipment ASTEX THREE STUB TUNER: Three Stub Tuner 1 1,200.00 427 Balzers   Balzers   RFS 302  Radio Frequency (RF) Generators in Power Supplies BALZERS RF POWER SUPPLY: RF Power Supply 1   191696 Branson/IPC   Branson/IPC   4000 Series  Barrel Resist Strippers in Plasma Resist Strippers BRANSON BARREL PLASMA ASHER & ETCHER: Barrel Plasma Asher/Etcher 1   126550 Branson/IPC   Branson/IPC   P3075/2  Barrel Resist Strippers in Plasma Resist Strippers BRANSON BARREL RESIST STRIPPER: Barrel Resist Stripper Branson P3075/2 1   F* 189210 Branson/IPC   Branson/IPC   4155/2  Barrel Resist Strippers in Plasma Resist Strippers BRANSON PLASMA ASHER/ETCHER: Plasma Asher/Etcher 1   223494 Branson/IPC   Branson/IPC   P2100  Barrel Resist Strippers in Plasma Resist Strippers BRANSON PLASMA STRIPPER 1250 WATT: Plasma Resist Stripper  Quartz Barrel - Solid State RF Generator 1   189241 Branson/IPC   Branson/IPC   7102  Barrel/Box Plasma Etchers in Plasma Etch Equipment BRANSON TEPLA PVA PLASMA ETCHER 1000 WATT: Plasma Etcher 1   F* 43020 Comdel   Comdel   CPS-5000/13.56  Radio Frequency (RF) Generators in Power Supplies COMDEL RADIO FREQUENCY GENERATOR POWER SUPPLY: Radio Frequency Generator 1 9,500.00 231089 Daihen   Daihen   FGA-50B, DMU-01G  Radio Frequency (RF) Generators in Power Supplies DAIHEN AMAT Water Cooled RF Generator 5000W 40.68MHz 50/60Hz: RF Generator New Surplus Applied Materials P/N 0191-71542 2   230846 Daihen   Daihen   RGA-50J3, DMU-01G  Radio Frequency (RF) Generators in Power Supplies DAIHEN WATER COOLED RF GENERATOR 5000W 13.56MHZ: RF Generator New Surplus   12   223580 Advanced Energy   Advanced Energy   Cesar 4020  Radio Frequency (RF) Generators in Power Supplies DRESSLER ADVANCED ENERGY 2000W 40.68 MHz RF GENERATOR: RF Generator   1   1001 ENI   ENI   PL3  Radio Frequency (RF) Generators in Power Supplies ENI POWER SYSTEMS PLASMALOC 3 RF GENERATOR POWER SUPPLY: Plasmaloc 3 RF Generator 1   102336 ENI   ENI   OEM 12B  Radio Frequency (RF) Generators in Power Supplies ENI POWER SYSTEMS RF GENERATOR 1250W, 13.56 MHZ: Radio Frequency Generator Acquired by MKS Instruments Representative photo 1   151365 ENI   ENI   OEM 12A  Radio Frequency (RF) Generators in Power Supplies ENI POWER SYSTEMS RF GENERATOR 1250W, 13.56 MHZ: Radio Frequency Generator 3   185506 ENI Power Systems   ENI Power Systems   OEM-6AM-1B-21251  Radio Frequency (RF) Generators in Power Supplies ENI POWER SYSTEMS RF POWER SUPPLY 13.56 MHz: RF Generator 3   993 ENI   ENI   LPG12A-21051-50  Radio Frequency (RF) Generators in Power Supplies ENI POWER SYSTEMS SOLID STATE RF GENERATOR POWER SUPPLY: Solid State RF Generator 4 2,500.00 F* 142856 Japan Radio Co.   Japan Radio Co.   NAH-1030-2A/NFC-30-2A  Radio Frequency (RF) Generators in Power Supplies JAPAN RADIO CO. RF GENERATOR/MATCHING NETWORK: RF Generator/Matching Network 2   34890 LAM Research Co   LAM Research Co   490 AUTO ETCH  Poly/Nitride Etchers in Single Chamber Plasma Tools LAM RESEARCH SIX INCH NITRIDE ETCHER: Six Inch Nitride Etcher Automated Cassette to Cassette single wafer etching. 1   F* 108528 March Instruments   March Instruments   PM-600  Barrel/Box Plasma Etchers in Plasma Etch Equipment MARCH INSTRUMENTS BARREL PLASMA ETCHER 300 WATT: Barrel Plasma Etcher with Vacuum Pump March Instruments, manufacturer of plasma systems, was acquired by Nordson - called Nordson MARCH. 1   F* 51482 March Instruments   March Instruments   SUPERPLASMOD  Barrel Resist Strippers in Plasma Resist Strippers MARCH INSTRUMENTS PLASMA CLEANER: Plasma Cleaner with 300W Power Supply 2   F* 177136 March Instruments   March Instruments   PX-2400  Barrel/Box Plasma Etchers in Plasma Etch Equipment MARCH NORDSON BOX PLASMA ETCHER 1000 WATT 13.56 MHz: Box Plasma Etcher Applications "Gas plasma treatment provides a fast, efficient method for surface treatment and cleaning prior to wire bonding, die attach, encapsulation, conformal coating and other processes. Plasma processing enhances lamination bondstrength, improves wire bond strength and uniformity,promotes underfill adhesion and enhances die attach." Source -- March Nordson. 1   199963 March Instruments   March Instruments   PX-500  Barrel/Box Plasma Etchers in Plasma Etch Equipment MARCH NORDSON BOX PLASMA ETCHER 600 WATT 13.56 MHZ: Box Plasma Etcher 1   F* 59142 Metroline   Metroline   M4L  Barrel Resist Strippers in Plasma Resist Strippers METROLINE BOX PLASMA ETCHER: Box Plasma Etcher 1   F* 143041 National Electronic   National Electronic   MH3.OW-SL  Radio Frequency (RF) Generators in Power Supplies NATIONAL ELECTRONICS/RICHARDSON MICROWAVE MAGNETRON HEAD: Microwave Magnetron Head 2   208462 Plasma-finish   Plasma-finish   V15G  Barrel/Box Plasma Etchers in Plasma Etch Equipment PLASMA-FINISH GMBH PLASMA ETCHER SYSTEM 300 WATT: Plasma Box Etcher System PINK GmbH acquired Plasma-Finish - now called PINK GmbH Plasma-Finish 1   3011 Plasma-Therm   Plasma-Therm   Wafer Batch 740/740  Metal Etchers in Single Chamber Plasma Tools PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM: Dual Plasma Etch and Reactive Ion Etch Processing Systems System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.   1   4054 Plasma-Therm   Plasma-Therm   73/74  Metal Etchers in Single Chamber Plasma Tools PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM: Combination PECVD and Dual Plasma Etch/Reactive Ion Etch Processing Systems 1   50854 Plasma-Therm   Plasma-Therm   VII 734  Metal Etchers in Single Chamber Plasma Tools PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE: Combination Plasma Deposition System/RIE 1   F* 11919 Plasma-Therm   Plasma-Therm   VII 734MF  Metal Etchers in Single Chamber Plasma Tools PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM: Plasmatherm RIE/Plasma Etch System 1   F* 206582 Plasma-Therm   Plasma-Therm   BT 6" RIE MF  Metal Etchers in Single Chamber Plasma Tools PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6": Reactive Ion Etch System BatchTop VII 1   45428 Plasma-Therm   Plasma-Therm   790 ICP  Poly/Nitride Etchers in Single Chamber Plasma Tools PLASMATHERM ICP PLASMA ETCHER: Inductively Coupled Plasma Etcher with 9.5 Inch Electrode 1   F* 124315 Plasma-Therm   Plasma-Therm   790 11" RIE  Metal Etchers in Single Chamber Plasma Tools PLASMATHERM REACTIVE ION ETCH SYSTEM 11": Reactive Ion Etch System - 11" Electrode 1   F* 45430 Plasma-Therm   Plasma-Therm   790 11 RIE  Metal Etchers in Single Chamber Plasma Tools PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM: Reactive Ion Etch System 11" Electrode 1   201152 Plasma-Therm   Plasma-Therm   790 RIE PECVD 11"  Etchers - Other in Single Chamber Plasma Tools PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX: Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board. Both top and bottom electrodes can be powered sequentially. 1   142821 Plasma-Therm   Plasma-Therm   Unaxis 790  Etchers - Other in Single Chamber Plasma Tools PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM: Shuttle Load Lock System 1   230353 Advanced Energy   Advanced Energy   B0111-DPXX-105-XX  Radio Frequency (RF) Generators in Power Supplies Profibus communication board for Advanced Energy CESAR generators: Profibus communication board for Advanced Energy CESAR generators 5   179021 Seren   Seren   CEX-6  Radio Frequency (RF) Generators in Power Supplies SEREN IPS COMMON EXCITER: Common Exciter - Part number 9500170000 2   126554 Seren   Seren   IPS-R300  Radio Frequency (RF) Generators in Power Supplies SEREN RF GENERATOR POWER SUPPLY 300W 13.56 MHz: RF Generator 1 3,100.00 179019 Seren   Seren   R601  Radio Frequency (RF) Generators in Power Supplies SEREN RF GENERATOR, 600 WATTS: RF Generator Part number 9600610028. You may also be interested in Seren MC2 Matching Network Controller 6   231656 SPI Supplies   SPI Supplies   Plasma Prep III  Barrel Resist Strippers in Plasma Resist Strippers SPI BENCHTOP PLASMA ETCHER 100 WATT: Solid State Plasma Etcher/Asher 1 6,500.00 84296 Surface Tech Sys   Surface Tech Sys   308 PC  Barrel/Box Plasma Etchers in Plasma Etch Equipment STS SURFACE TECHNOLOGY SYSTEMS BARREL PLASA ETCHER 600 WATT: Barrel Plasma Etcher 1   147500 Surface Tech Sys   Surface Tech Sys   MXP Multiplex ICP HR  Etchers - Other in Single Chamber Plasma Tools SURFACE TECHNOLOGY SYSTEMS MXP ICP HR: Chlorine Etcher - Year 2003 1   102178 Surface Tech Sys   Surface Tech Sys   MXP Multiplex ICP ASE HR  Silicon Etchers in Single Chamber Plasma Tools SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER: Silicon Etcher - Year 2003 1   184779 Technics   Technics   Micro Stripper -- Series 200  Metal Etchers in Single Chamber Plasma Tools TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz: Technics Micro Stripper Series 200 Plasma System 1   F* 181401 Tepla   Tepla   4011  Barrel/Box Plasma Etchers in Plasma Etch Equipment TEPLA PLASMA ETCHER 4000 WATT: Planar Plasma Etcher 1   F* 119294 Trion Technology   Trion Technology   Oracle  Cluster Plasma Tools - Oxide in Cluster Plasma Tools TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL: Dielectric Cluster Tool Trion Technology Oracle 1   F* 126704 Ulvac   Ulvac   NE 7800 Ferroelectric Etcher  Cluster Plasma Tools - Metal in Cluster Plasma Tools ULVAC FERROELECTRIC ETCHER: Like New Condition System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field). The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications. Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.   1   F* 124316 Yield Engineerng Sys   Yield Engineerng Sys   CV100PZ  Plasma Processing Equipment and Tools - Other in Plasma Processing Equipment YIELD ENGINEERING DOWNSTREAM MICROWAVE PLASMA RESIST STRIPPER: Plasma Resist Stripper Cassette to Cassette or Manual Operation Yield Engineering YES-CV100PZ 1

*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Plasma Processing Equipment: Advanced Energy, Advanced Plasma System, Inc., Applied Materials, Inc., Astex, Balzers, Branson/IPC, Comdel, Daihen, ENI Power Systems, Japan Radio Co., LAM Research Corp., March Instruments, Metroline, National Electronic, Plasma-finish Enterprise, Plasma-Therm, Seren, SPI Supplies, Surface Technology Systems, Technics, Tepla, Trion Technology, Ulvac, Yield Engineering Systems