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Our Refurbishment Process for RIE ICP and DRIE Plasma Etchers:
Whether you are looking for a fully refurbished etcher or a fully functional used etcher Capovani Brothers has a solution. The reality is that every customer's needs and budgets are different. As we have learned though the years the main reason for buying used equipment is a better value and higher return on investment. Our goal is to provide an etch tool that will meet the OEM specs and meet our customers expectations with consideration to budget and level of refurbishment.

There are many levels for refurbishment that can be performed on a plasma etcher. They range from a fully functional used system were all components are checked, verified for performance and the etcher operates to OEM specs to a complete overhaul refurbishment of the etcher, where vacuum pumps are rebuilt, gas manifold replaced as new, MFCs cleaned and recalibrated, vacuum valves rebuilt, all seals replaced, wet cleaning and reanodizing of chamber and so on. Capovani Brothers has capability to meet your refurbishment requirements whatever they may be. We also can perform customizations to the etcher as well. Don't be deterred if the etcher you see does not match your requirements. We routinely add and modify the etchers we have to meet our customer's requirements. Let us know what you requirements are.

The Level of Refurbishment We Do As A Minimum to Each Plasma Etcher:
We begin with an overall assessment of system and its components. The etcher is facilitated and made operational in its current state of condition. This allows us to identify areas which may be problematic or need attention giving us a good sense of the overall condition of the etcher before we begin the actual refurbishment process:

Chamber is dismantled and all components cleaned.
Chamber viewing windows are replaced.
Rings and seals replace as needed.
Vacuum valves are cleaned, leak checked and seals replaced as needed.
Vacuum pumps both turbo and mechanical are verified that they achieve specified base pressure. Pumps     with noisy bearings or ones that do not perform within specification are rebuilt.
MFCs are sent out for cleaning and calibration when specified.
Each gas channel is operated and verified. NB: we only us nitrogen in our testing
RF generator is tested over power range, deficiencies are corrected.
RF generator and etcher are tested for RF leakage.
Load lock transfer mechanism, if equipped, is inspected, verified and repaired as necessary.
Cooling lines inspected for cracks, wear and deformation, flow is verified, replaced as needed.
Heated electrode tested, temp output verified, repaired as necessary
Chiller, if equipped is tested and verified.

Optional Refurbished Items for Plasma Etchers:
Gas manifold plumbing replaced as new.
Gas manifold filters replaced.
Gas manifold valves cleaned and rebuilt, or replaced with new.
Vacuum pumps rebuilt.
Anodize chamber and components.
Replace all cooling lines and flow meters.
Replace all o rings and seals in the system.
Rebuild vacuum valves.
Rebuild transfer robots where equipped.
Install new substrate platters if equipped.

To view our complete stock of used Parallel Plasma Tools, visit our Plasma Etcher Tools Category

Learn about our Refurbishment and Functional Testing Procedures for other types of used equipment.