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in Cluster Plasma Tools - Oxide
Item ID: 119294

Offered 1 Offered at Best Price


Dielectric Cluster Tool

Trion Technology Oracle

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Location: Scotia, New York, United States
Unit Price Unstated
Number of Units 1
Manufacturer Trion Technology
Model Oracle
Wafer Size Range 
  Minimum 50 mm
  Maximum 200 mm
  Set Size 200 mm
Number of Chambers 1
Process Capabilities Oxide Etch
Chamber 1 Description 

RIE Dielectric Etch
Phantom III RIE Reactor

Controller Type PC Controller Type
Elevator Type Brooks Automation VCE 6
Process Gases CF4, CHF3, Ar, O2
Other Information 

Central Vacuum
Transport (CVT) Platform
High Conductance Plenum and Vacuum System
Manual Wafer Load Port
Automatic Pressure Control
600 Watt, 13.56 MHz RF Generator
DC Bias Control
Brooks Automation VCE6 Vacuum Cassette Elevator
(2) Ebara ESR20N 2,000 LPM Dry Pumps,

Power Requirements 208 V     49.0 A     60 Hz     3¬†Phase
Year of Manufacture 2006

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).


Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions