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Item ID: 116808

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Semiautomatic Vacuum Probe Station

Suss MicroTec model PAV150
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Location: Scotia, New York, United States
Unit Price Unstated
Number of Units 1
Manufacturer Süss Microtec Test S
Model PAV150
Description Semiautomatic Vacuum Probe Station
Wafer Size Range 
  Maximum 150 mm
  Set Size 100 mm
Accessories Pfeiffer Turbo Pump: TC 600
Varian Scroll Pump: PTS06001UNIV
Pfeiffer Chiller: T2K400
Boeckeler Video Measurement System: VIA-100
Viewing objective: Mitutoyo M plan APO 10x/0.28, F=200
Loading tool and substrate carrier for 100mm substrate
  • Operating System: Windows 2000 Professional, Windows Embedded NT, Windows NT 4.0
  • Control PC Software: Cryo/Kernel Software version 1.06
  • IPC Software: Cryo Special Software, version 5.06.3
Other Information Vacuum Stage:
  • Travel Range X,Y,& Z: X=150 mm, Y=150mm, Z=12 mm, and Theta = +/- 6°
  • Accuracy: +10um(44 points of 150 mm cycle area)
  • Repeatability: +/- 5 um
  • Resolution 1 um
    Vacuum chamber:
  • Vacuum: Up to 5 x 10-5 mbar
  • Chamber heater: Up to 70°C
    Microscope Stage:
  • Travel range: 50 mm x 50 mm x 110 mm
    Facilities Requirements:
  • Compressed air: 4-6 bar
  • Nitrogen: 4 bar, consumption about 160 l per cycle
Extended Description  Details at PAV150 data sheet.pdf
Year of Manufacture 2003
Power Requirements 240 V     20.0 A     60 Hz     1 Phase
CE Marked YES
Exterior Dimensions 
  Width 157.480  in  (400.0 cm)
  Depth 110.236  in  (280.0 cm)
  Height 70.866  in  (180.0 cm)
Weight 2,000  lb  (907 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions