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in Standalone Sputterers
Item ID: 229615

Offered 1 Offered at Best Price


R&D Sputtering System

Two Source, Turbo Pumped, with many features

In addition to this AJ International Inc ATC Orion 4, Capovani Brothers Inc. stocks a variety of other used and refurbished Thin Film Deposition tools including Sputtering, Electron Beam Evaporators (E Beam) and Thermal Evaporators (Resistive Evaporators). Typical manufactures include Airco Temescal, Applied Materials, CHA Industries, CVC, Denton, Dynavac, Edwards, Leybold, Oerlikon, Temescal, Varian, Veeco Instruments and VonArdenne.

To view our complete stock of used physical vapor deposition equipment, visit our Physical Vapor Deposition Equipment Category.

Learn more about our Physical Vapor Deposition (PVD) Equipment Refurbishment and Functional Testing Procedures

This used sputtering system and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus equipment list

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Location: Scotia, New York, United States
Unit Price Unstated
Number of Units 1
Manufacturer AJ International Inc
Model ATC Orion 4
Description Two- 2" source, 3 gas input, 300W
Vacuum System Turbo Pumped
Vacuum System 

Pfeiffer TMU 261 Turbo, 210 l/s, Pfeiffer TC600, Pfeiffer DCU

Load Lock Included No
Number of Cathodes Two
Target Size 2 Inch
Quantity of RF Cathodes 2
Gas Inputs Three
Gas Input Control Mass Flow Controllers
Substrate Heaters Yes
Residual Gas Analyzer No
RF Generator 
  Manufacturer Seren
  Model R301
  Rated Power Output 300 Watts
  Frequency 13.36 MHz
  Matching Network Yes

Substrate heating (2) 1000 Watt lamp heater 

RF powered substrate holder, O2 supplied via MFC

Substrate Rotation

Source to substrate distance manually adjustable, travel 1.5"

10" diameter SS chamber with (2) manually shielded 2.75" view ports.

6.5" quick access port on right side.

Manual highvac isolation valve,  HVA Model: 11110-0600


Other Information 

AJ International ST-20 Sputtering source -- Qty. 1

AJ International ST-20 Orion Sputtering Source -- Qty. 1


MKS M100B21CS1BV  MFC -- 20 SCCM N2

MKS M100B21CS1BV-S MFC -- 20 SCCM 02

Seren manual RF load match system with source [INVALID]or

AJA SHQ-15A PID Heater Controller

AJA MFCX 3 channel MFC Controller

AJA Substrate Rotation Controller

NB:  As part of the refurbishment the chamber will be stripped, removed from the system and cleaned.   System was used to sputter Au and Ti

Power Requirements 220 V     30.0 A     60 Hz     1¬†Phase
Exterior Dimensions 
  Width 23.000  in  (58.4 cm)
  Depth 32.000  in  (81.3 cm)
  Height 72.000  in  (182.9 cm)
Weight 530  lb  (240 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).


Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions