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in Standalone Sputterers
Item ID: 93627

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Sputtering System

In addition to this Sharon Vacuum Sputtering System, Capovani Brothers Inc. stocks a variety of other used and refurbished Thin Film Deposition tools including Sputtering, Electron Beam Evaporators (E Beam) and Thermal Evaporators (Resistive Evaporators). Typical manufactures include Airco Temescal, Applied Materials, CHA Industries, CVC, Denton, Dynavac, Edwards, Leybold, Oerlikon, Temescal, Varian, Veeco Instruments and VonArdenne.

To view our complete stock of used physical vapor deposition equipment, visit our Physical Vapor Deposition Equipment Category.

Learn more about our Physical Vapor Deposition (PVD) Equipment Refurbishment and Functional Testing Procedures

This used sputtering system and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus equipment list

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Location: Scotia, New York, United States
Unit Price Unstated
Number of Units 1
Manufacturer Sharon Vacuum
Model Sputtering System
Description Sputtering System
Vacuum System Cryo Pumped
Vacuum System 

Leybold D40B Mechanical Pump
CTI Cryotorr 8 with CTI 8200 Compressor
MKS Series 600 Pressure Controller
(3) MKS MFC's: N2 200 SCCM, O2 200 SCCM, Ar 200 SCCM
Meivac Model VQ6ASAUSM Throttle Valve
MKS 627B 1 Torr range capacitance manometer

Load Lock Included No
Number of Cathodes Three
Target Size 6"
Quantity of DC Cathodes 2
Quantity of RF Cathodes 1
Number of RF Etch Cathodes 0
Gas Inputs Three
Gas Input Control Mass Flow Controllers
Substrate Heaters No
Residual Gas Analyzer No
RF Generator 
  Manufacturer Advanced Energy
  Model RFXII 1250
  Rated Power Output 1250 Watts
  Matching Network Yes

All sputtering sources are magnetrons.

Other Information 

Manual/Automatic pump down control
Commonwealth Scientific 8cm gridded ion source.
Sycon Model STM-100/MF thickness/rate monitor
Lake Shore Modle 818 Cryopump Monitor
Advanced Energy MDX 5K Magnetron Drive
Advanced Energy RFXII-1250 13.56 MHz generator
Advanced Energy AZX 90 Tuner
Rotary substrate holder(holds up to 8" substrate)
Interior Chamber Dimensions: 21.5" x 21.5" x 21.5"

Power Requirements 240 V     80.0 A     60 Hz     3¬†Phase

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).


Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions