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Item ID	Item Description		Size Range	Process	Cass to Cass	Loadlock	#	Price	Notes

Item ID	Make	Model	Set Size	Process	Cass to Cass	Loadlock Y/N	#	Price	Notes
								$
201152	Plasma-Therm	790 RIE PECVD 11"		RIE PECVD			1
142821	Plasma-Therm	Unaxis 790		DRIE PECVD		YES	1
147500	Surface Tech Sys	MXP Multiplex ICP HR	150 mm	Chlorine Etch		YES	1

NOTE:
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   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Other Etchers:
Plasma-Therm, Surface Technology Systems

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