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Mass Flow Controllers - Gas

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Capovani Brothers Inc stocks a wide range of used mass flow controllers. We offer a variety of gas types, flow ranges and fitting types. Cleaning and calibration service is available through a third party. Typical manufacturers include Brooks Instruments, Celerity, Millipore Tylan, MKS Instruments, Inc., Mykrolis, Schumacher, and Unit Instruments.

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Item ID	Photo	Item Description		Description	Gas Type(s)	Flow Range	Fitting		Connector Type	#	Price	Notes

Item ID	Photo	Make	Model	Description	Gas Type(s)	Max	Type	Diameter	Connector Type	#	Price	Notes
						»slpm sccm		»cm in			$
173307		Brooks Instrument	0152E	Mass Flow readout and controller						1
126879		Brooks Instrument	5850D	Mass Flow Controller	N₂	50.0	VCR	0.250	Edge Card	1	725.00
126585		Brooks Instrument	5850E	Mass Flow Controller	N₂	100.0	VCR	0.250	Edge Card	1	725.00
4762		Brooks Instrument	5850E	Mass Flow Controller	N₂	200.0	VCR	0.250	Edge Card	2	725.00
131526		Brooks Instrument	5850E	Mass Flow Controller	H₂	20,000.0	VCR	0.250	15-pin D	2	725.00	F*
131563		Brooks Instrument	5850E	Mass Flow Controller	N₂	30,000.0	VCR	0.250	15-pin D	1	725.00
131764		Brooks Instrument	5850E	Mass Flow Controller	CF₄	200.0	VCR	0.250	Edge Card	2	725.00
126881		Brooks Instrument	5850EM - Metal Series	Mass Flow Controller	SF₆	200.0	VCR	0.250	15-pin D	1	900.00
131762		Brooks Instrument	5850S	Mass Flow Controller	50% N₂, 50% O₂	10,000.0	VCR	0.250	15-pin D	2	800.00
131805		Brooks Instrument	5851S	Mass Flow Controller	N₂O	50,000.0	VCR	0.250	15-pin D	2	1,000.00
131810		Brooks Instrument	6256S	Mass Flow Controller	CF₄	500.0	VCR	0.250	15-pin D	2	1,100.00
196912		Brooks Instrument	GF120C	Mass Flow Controller -- New Unused	Argon	50.0	VCR	0.250		1
196913		Brooks Instrument	GF120C	Mass Flow Controller	Argon	50.0	VCR	0.250		2		F*
196914		Brooks Instrument	GF120C	Mass Flow Controller	Argon	5.0	VCR	0.250		2		F*
231885		Brooks Instrument	GF120C	Mass Flow Controller -- New Unused	Argon	5.0	VCR	0.250		1
129486		Celerity	DSWAD10W	Mass Flow Controller	3%/H₂/N₂	12,000.0	VCR	0.250	DeviceNet	1	1,250.00
124387		Millipore Tylan	FC-2901V	Mass Flow Controller	N₂	1,000.0	VCR	0.250	15-pin D	1
129444		Millipore Tylan	FC-2911V	Mass Flow Controller	N₂	20,000.0	VCR	0.250	15-pin D	1	880.00
133751		Millipore Tylan	FC-2911V	Mass Flow Controller	H₂	20,000.0	VCR	0.250	15-pin D	2	800.00	F*
124379		Millipore Tylan	FC280SAV	Mass Flow Controller	N₂	5,000.0	VCR	0.250		7
129019		MKS Instruments	1150C-4037V	Mass Flow Controller	Water	15.5	VCR	0.500		4	2,950.00
84813		MKS Instruments	247D	Readout and Power Supply for MFC - 4 Channel						2	1,100.00
48144		MKS Instruments	ROR IN -Situ	Flow Verifier						1		F*
129419		MKS Instruments, Inc	1150C-298V	Mass Flow Controller	Water	10.0	VCR	0.500		1	2,950.00	F*
243009		MKS Instruments, Inc	1160B	Mass Flow Controller	N2	50.0	VCR	0.250	Edge Card	1	725.00
243010		MKS Instruments, Inc	1160B	Mass Flow Controller	N2	100.0	VCR	0.250	Edge Card	1	725.00
243011		MKS Instruments, Inc	1160B	Mass Flow Controller	N2	200.0	VCR	0.250	Edge Card	1	725.00
204819		MKS Instruments, Inc	1179A	Mass Flow Controller	BF3	20.0	VCR	0.250	15-pin D	1	725.00
126980		MKS Instruments, Inc	1479A23CR16M-S	Mass Flow Controller	N₂	2,000.0	VCR	0.250	DeviceNet	1	1,195.00
41113		MKS Instruments, Inc	1479A53CR16M	Mass Flow Controller	N₂	5,000.0	VCR	0.250	DeviceNet	4	1,195.00
134622		MKS Instruments, Inc	179BX52CR34M	Mass Flow Meter	N₂	500.0	VCR	0.250	9-pin D	1	625.00
163558		MKS Instruments, Inc	2179A-14CR15V	Mass Flow Controller	N2	10,000.0				1	600.00
163557		MKS Instruments, Inc	2179A-25660	Mass Flow Control With Shutoff Valve Gas	N2		VCR			2	600.00
163559		MKS Instruments, Inc	2179A-25661	Mass Flow Controller	N2					1	600.00
163560		MKS Instruments, Inc	2179A53CR15V	Mass Flow Controllers	N2	5,000.0				1	600.00
86701		MKS Instruments, Inc	2259C-00100SV	Mass Flow Controller	N₂	100.0	Compression	0.250	15-pin D	1
198805		MKS Instruments, Inc	247C	Readout and Power Supply for MFC- 4 Channel	ANY					1	950.00
82862		MKS Instruments, Inc	649A-21405	Mass Flow Controller w/pressure controller	N₂	10.0	VCR	0.250	15-pin D	1	2,040.00	F*
131522		MKS Instruments, Inc	649A51T11CAVR	Mass Flow Controller w/Pressure Controller	N₂	10.0	VCR	0.250	15-pin D	2	2,040.00	F*
129423		Mykrolis	FC-2900V	Mass Flow Controller	CF₄	500.0	VCR	0.250	Edge Card	2	880.00
129425		Mykrolis	FC-2900V-4V	Mass Flow Controller	CHF₃	500.0	VCR	0.250	Edge Card	1	880.00
129426		Mykrolis	FC-2900V-4V	Mass Flow Controller	O₂	5,000.0	VCR	0.250	Edge Card	1	880.00
191170		Teledyne Hastings In	HFC-202	Mass Flow Controller	N2	100.0	Compression	0.250	15-pin D	1
191229		Teledyne Hastings In	HFC-202	Mass Flow Controller	Argon	100.0	Compression	0.250	15-pin D	1		F*
42603		Unit Instruments	3020A	Mass Flow Controller	N₂	50,000.0				1	710.00
128305		Unit Instruments	3050A	High Flow Mass Flow Controller	N₂	50,000.0	VCR	0.500	15-pin D	1	1,250.00	F*
42602		Unit Instruments	UFC-1000	Mass Flow Controller	SiH₄ / PH₃		VCR	0.250	Edge Card	2	700.00	F*
42604		Unit Instruments	UFC-1020	Mass Flow Controller	He	200.0	VCR	0.250	Edge Card	1	750.00
42600		Unit Instruments	UFC-1100	Mass Flow Controller	Multiple available		VCR	0.250	Edge Card	8	820.00
42601		Unit Instruments	UFC-1100A	Mass Flow Controller	Multiple available		VCR	0.250	Edge Card	3	820.00
129438		Unit Instruments	UFC-1400A	Mass Flow Controller	CF₄	500.0	VCR	0.250	Edge Card	1	820.00
129448		Unit Instruments	UFC-1400A	Mass Flow Controller	N₂	2,000.0	VCR	0.250	Edge Card	1	820.00
129450		Unit Instruments	UFC-1660	Mass Flow Controller	NF₃	500.0	VCR	0.250	Edge Card	1	980.00
129446		Unit Instruments	UFC-1660	Mass Flow Controller	NF₃	500.0	VCR	0.250	Edge Card	1	980.00
129480		Unit Instruments	UFC-1660	Mass Flow Controller	N₂	500.0	VCR	0.250	Edge Card	1	980.00
129066		Unit Instruments	UFC-1660	Mass Flow Controller	N₂	1,000.0	VCR	0.250	Edge Card	4	980.00
129070		Unit Instruments	UFC-1660	Mass Flow Controller	3%/H₂/N₂	2,000.0	VCR	0.250	Edge Card	2	980.00
129110		Unit Instruments	UFC-1660	Mass Flow Controller	O₂	5,000.0	VCR	0.250	Edge Card	3	980.00
129384		Unit Instruments	UFC-1660	Mass Flow Controller	CHF₃	500.0	VCR	0.250	Edge Card	1	980.00
129456		Unit Instruments	UFC-1661	Digital Mass Flow Controller	Xe	10.0	VCR	0.250	Edge Card	1	1,250.00
128304		Unit Instruments	UFC-3100	High Flow Mass Flow Controller	N₂	50,000.0	VCR	0.500	15-pin D	1	1,250.00	F*
128213		Unit Instruments	UFC-8100	Mass Flow Controller	O₂	20,000.0	VCR	0.250	15-pin D	2	880.00
128233		Unit Instruments	UFC-8100	Mass Flow Controller	N₂	1,000.0	VCR	0.250	Edge Card	3	880.00
129170		Unit Instruments	UFC-8100	Mass Flow Controller	N₂	200.0	VCR	0.250	Edge Card	1	880.00
129381		Unit Instruments	UFC-8100	Mass Flow Controller	CF₄	500.0	VCR	0.250	Edge Card	4	880.00
129383		Unit Instruments	UFC-8100	Mass Flow Controller	CF₄	20.0	VCR	0.250	Edge Card	4	880.00
129067		Unit Instruments	UFC-8100	Mass Flow Controller	O₂	10,000.0	VCR	0.250	15-pin D	1	880.00
42605		Unit Instruments	UFC-8100	Mass Flow Controller	CF₄ / O₂		VCR	0.250	Edge Card	2	820.00
126131		Unit Instruments	UFC-8100	Mass Flow Controller	CF₄	500.0	VCR	0.250	Edge Card	2	800.00	F*
126132		Unit Instruments	UFC-8100	Mass Flow Controller	O₂	5,000.0	VCR	0.250	Edge Card	2	800.00
126133		Unit Instruments	UFC-8100	Mass Flow Controller	CHF₃	500.0	VCR	0.250	Edge Card	2	800.00
126136		Unit Instruments	UFC-8100	Mass Flow Controller	4/H₂ / N₂	5,000.0	VCR	0.250	Edge Card	2	800.00	F*
129443		Unit Instruments	UFC-8100	Mass Flow Controller	N₂	200.0	VCR	0.250	Edge Card	1	880.00	F*
133688		Unit Instruments	UFC-8100	Mass Flow Controller	N₂	200.0	VCR	0.250	Edge Card	1	800.00
129069		Unit Instruments	UFC-8165C	Mass Flow Controller	NH₃	3,000.0	VCR	0.250	DeviceNet	1	1,000.00	F*
129167		Unit Instruments	UFC-8165C	Mass Flow Controller	O₂	10,000.0	VCR	0.250	DeviceNet	1	1,000.00
129416		Unit Instruments	UFC-8165C	Mass Flow Controller	3%H₂/N₂	3,000.0	VCR	0.250	DeviceNet	2	1,250.00
128295		Unit Instruments	UFC-8165C	Mass Flow Controller	N₂	5,000.0	VCR	0.250	DeviceNet	6	1,250.00
128300		Unit Instruments	UFC-8165C	Mass Flow Controller	CF₄	1,000.0	VCR	0.250	DeviceNet	2	1,250.00	F*
129020		Unit Instruments	UFC-8165C	Mass Flow Controller	O₂	1,000.0	VCR	0.250	DeviceNet	1	1,250.00
129065		Unit Instruments	UFC-8165C	Mass Flow Controller	O₂	10,000.0	VCR	0.250	DeviceNet	1	1,250.00

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Mass Flow Controllers - Gas:
Brooks Instrument, Celerity, Millipore Tylan, MKS Instruments, Inc., Mykrolis, Teledyne Hastings Instruments , Unit Instruments

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