We sell used PECVD production tools including single chamber and cluster tools. Tools we currently have include an Applied Materials (AMAT) P5000, a Plasmatherm VLR700 and a Nexx Systems Cirrus 300 System. We are adding equipment to our inventory daily. So, if you do not see a system or tool you are in need of, give us a call or send us an email.
Single Chamber PECVD. Mixed Frequency Deposition (MFD) Both High Frequency (13.56 MHz) and Low Frequency (50-460 kHz) RF power delivered both electrodes.