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We sell used PECVD production tools including single chamber and cluster tools. Tools we currently have include an Applied Materials (AMAT) P5000, a Plasmatherm VLR700 and a Nexx Systems Cirrus 300 System. We are adding equipment to our inventory daily. So, if you do not see a system or tool you are in need of, give us a call or send us an email.

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Single Chamber PECVD. Mixed Frequency Deposition
(MFD) Both High Frequency (13.56 MHz) and Low Frequency (50-460 kHz)
RF power delivered both electrodes.

Items from the following manufacturers are offered under PECVD Tools:
Nexx Systems, Oxford Instruments, Plasma-Therm