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Single Chamber Plasma Tools

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We offer a wide variety of plasma processing tools and systems. Plasma etchers are tested for system functionality. Chamber and exhaust lines are cleaned. Vacuum pumps are tested or rebuilt and MFC’s are cleaned and calibrated. Gas manifolds and lines can be replaced for an additional cost. The entire system is tested for leaks. Once system is complete, source inspections will occur. System functions will be demonstrated including gas delivery and vacuum systems, as well as generating inert gas plasma. (Note: process gases are not used in demonstrations). Learn more about our Plasma Etching Equipment Refurbishment and Functional Testing Procedures

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Combination Plasma Deposition System/RIE

Items from the following manufacturers are offered under Single Chamber Plasma Tools:
Applied Materials, Inc., LAM Research Corp., Plasma-Therm, PlasmaQuest, Surface Technology Systems, Technics