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Parallel Plasma Tools

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Cluster Plasma Tools - Metal in Cluster Plasma Tools (1)

Cluster Plasma Tools - Other in Cluster Plasma Tools (no items)

Cluster Plasma Tools - Oxide in Cluster Plasma Tools (1)

Cluster Plasma Tools - Poly/Nitride in Cluster Plasma Tools (no items)

Cluster Plasma Tools - Silicon in Cluster Plasma Tools (no items)

Cluster Plasma Tools - Tungtsten in Cluster Plasma Tools (no items)

Etchers - Other in Single Chamber Plasma Tools (3)

Metal Etchers in Single Chamber Plasma Tools (8)

Oxide Etchers in Single Chamber Plasma Tools (2)

Poly/Nitride Etchers in Single Chamber Plasma Tools (2)

Silicon Etchers in Single Chamber Plasma Tools (1)

Tungsten Etchers in Single Chamber Plasma Tools (no items)

Items from the following manufacturers are offered under Parallel Plasma Tools:
Applied Materials, Inc., LAM Research Corp., Plasma-Therm, Surface Technology Systems, Technics, Trion Technology, Ulvac

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