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List all 12 product types under Parallel Plasma ToolsList all 12 product types under Parallel Plasma Tools

We offer a wide variety of plasma processing tools and systems. Plasma etchers are tested for system functionality. Chamber and exhaust lines are cleaned. Vacuum pumps are tested or rebuilt and MFC’s are cleaned and calibrated. Gas manifolds and lines can be replaced for an additional cost. The entire system is tested for leaks. Once system is complete, source inspections will occur. System functions will be demonstrated including gas delivery and vacuum systems, as well as generating inert gas plasma. (Note: process gases are not used in demonstrations). Learn more about our Plasma Etching Equipment Refurbishment and Functional Testing Procedures

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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes
Make Model
  $  
87948
Applied Materials  

Applied Materials  

8300 

List all items of this typeOxide Etchers

in Single Chamber Plasma Tools

APPLIED MATERIALS CONTROLLER:
Controller
1  
87949
Applied Materials  

Applied Materials  

8300 

List all items of this typeOxide Etchers

in Single Chamber Plasma Tools

APPLIED MATERIALS SYSTEM ELECTRONICS RACK:
System Electronics Rack
1  
91265
PlasmaQuest  

PlasmaQuest  

357 ECR 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

ASTEX PLASMAQUEST ECR PLASMA ETCHER:
ECR Plasma Etcher

Nexx Systems LLC. has acquired PlasmaQuest
1   F*
34890
LAM Research Co  

LAM Research Co  

490 AUTO ETCH 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

LAM RESEARCH SIX INCH NITRIDE ETCHER:

Six Inch Nitride Etcher

Automated Cassette to Cassette single wafer etching.

1   F*
11919
Plasma-Therm  

Plasma-Therm  

VII 734MF 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM:
Plasmatherm RIE/Plasma Etch System
1   F*
3011
Plasma-Therm  

Plasma-Therm  

Wafer Batch 740/740 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM:
Dual Plasma Etch and Reactive
Ion Etch Processing Systems


System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

1  
4054
Plasma-Therm  

Plasma-Therm  

73/74 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM:
Combination PECVD and Dual
Plasma Etch/Reactive Ion Etch
Processing Systems
1  
50854
Plasma-Therm  

Plasma-Therm  

VII 734 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE:
Combination Plasma Deposition System/RIE
1   F*
206582
Plasma-Therm  

Plasma-Therm  

BT 6" RIE MF 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6":

Reactive Ion Etch System

BatchTop VII

1  
45428
Plasma-Therm  

Plasma-Therm  

790 ICP 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

PLASMATHERM ICP PLASMA ETCHER:
Inductively Coupled Plasma Etcher with 9.5 Inch Electrode
1   F*
124315
Plasma-Therm  

Plasma-Therm  

790 11" RIE 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMATHERM REACTIVE ION ETCH SYSTEM 11":

Reactive Ion Etch System - 11" Electrode

1   F*
45430
Plasma-Therm  

Plasma-Therm  

790 11 RIE 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMATHERM REACTIVE ION ETCH SYSTEM 200MM:

Reactive Ion Etch System
11" Electrode

1  
201152
Plasma-Therm  

Plasma-Therm  

790 RIE PECVD 11" 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX:

Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board.

Both top and bottom electrodes can be powered sequentially.


1  
142821
Plasma-Therm  

Plasma-Therm  

Unaxis 790 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM:
Shuttle Load Lock System
1  
147500
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP HR 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

SURFACE TECHNOLOGY SYSTEMS MXP ICP HR:

Chlorine Etcher - Year 2003

1  
102178
Surface Tech Sys  

Surface Tech Sys  

MXP Multiplex ICP ASE HR 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER:
Silicon Etcher - Year 2003
1  
184779
Technics  

Technics  

Micro Stripper -- Series 200 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz:

Technics Micro Stripper Series 200 Plasma System

1   F*
119294
Trion Technology  

Trion Technology  

Oracle 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL:

Dielectric Cluster Tool


Trion Technology Oracle

1   F*
126704
Ulvac  

Ulvac  

NE 7800 Ferroelectric Etcher 

List all items of this typeCluster Plasma Tools - Metal

in Cluster Plasma Tools

ULVAC FERROELECTRIC ETCHER:

Like New Condition
System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application


The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field).
The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications.
Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.

 

1   F*


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Parallel Plasma Tools:
Applied Materials, Inc., LAM Research Corp., Plasma-Therm, PlasmaQuest, Surface Technology Systems, Technics, Trion Technology, Ulvac