Specification
Process chamber:
Material Aluminum
Width 820 mm
Height 138 mm
Depth 706 mm
Chamber door: Aluminum, quartz inspection window with ultraviolet and
high-frequency radiation protection
Vacuum system
Process pressure: Approx. 0.1 - 1 mbar
Gas and vacuum piping: High-grade steel, ¼“ Swagelok connections as well as
aluminum KF components
Gas supply: 2 - 4 separate gas ducts (2 option, metering by means
of mass-flow controller
Venting: By means of solenoid valve and series throttle valve
Vacuum
Ultimate pressure attainable: Approx. 0.01 mbar
Vacuum measurement: Capacitive pressure gauge
measuring range from 0.01 to 10 mbar
The suction system is located in the bottom of the chamber.
Electro-pneumatic valve DN 65 ISO-K in suction line. (Optional)
Dimensions:
Height: approx. 1720 mm
Width: approx. 1615 mm
Depth: approx. 950 mm
Weight: approx. 800 kg
Recommended pump equipment
Rotary-vane oil pump, two-stage, filled with PFPE oil
Minimum suction capacity 65 m3 / h
Exhaust filter with oil return
1 meter flexible metal tubing DN 65 ISO-K with connection components
Microwave generator
Regulated Magnetron
Frequency: 2.45 GHz
Power output: 2 x 2000 watts
Fault monitoring: Overload protection
Control unit
Display of:
• Process time
• HF output
• Process pressure
• Gas flow
Hardware:
• Centronics printer interface
• PC keyboard with Trackball
• RS 232
Software:
• Unlimited recipes can be programmed and afterwards automatically
processed and put into memory storage.
• A manual operating mode is available for test purposes.
• Superposing of information or fault message windows
Safety features:
• Safety switches on all parts of the housing
• Emergency Off switch
• Defined abortion sequences
• Plasma detection | 
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