
1 Offered at Best Price

SEMITOOL SPIN RINSE DRYER 380 MM
Large Area Substrate Spin Rinse Dryer
Semitool 4600L-5-2-E-VT SRD
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| Unit Price |
Unstated |
| Number of Units |
1 |
| Manufacturer | Semitool |
| Model | 4600L-5-2-E-VT |
| Substrate Size | Up to 380MM |
| Controller Model | PCS 102 |
| Resistivity Monitor | YES |
| Timer Duration | 0-3 hours |
| SRD Configuration | Single Stack |
| Accessories | (3) Clamshell carriers for substrates up to 380mm available as an option. |
| Other Information | Throughput: 50-60 substrates per hour depending on process time.
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| Power Requirements | 208 V 20.0 A 50/60 Hz 3 Phase
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| Year of Manufacture | 2003 |
| Exterior Dimensions |  |
 | | Width | 40.300 in (102.4 cm) |
| Depth | 47.500 in (120.6 cm) |
| Height | 71.500 in (181.6 cm) |
| Weight | 946 lb (429 kg) |
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| RELATED DOCUMENTS: click links to view |
 Extended Description |
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