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FULL DESCRIPTION of Item 11919

in Metal Etchers
Item ID: 11919

Offered1 Offered at Best Price


PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM

Plasmatherm RIE/Plasma Etch System

In addition to this Plasma-Therm VII 734MF, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM
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Unit Price Unstated
Number of Units 1
Manufacturer Plasma-Therm
Model VII 734MF
Wafer Size Range 
  Maximum 200 mm
Process RIE/Plasma Etch
Controller Type Microprocessor Controller Type
High Vacuum Pump Alcatel Turbomolecular Pump 5402CP
Roughing Pump None
RF Generator Model RFPP 10S
Number of Gas Inputs Five Gas
Process Gases C2H4, N2O, CF4, Ar ,H2
Chillers 
  Number of Chillers 1
  Chiller #1Manufacturer/Model Tek-Temp MM1500
Other Information Upper and lower electrodes: 12" x 12" w/2" radius corners
Lower electrode: 80 to 350°C
System power center
Mass flow control
(8) MKS mass flow controls, 4 @ 200 sccm and 4 @ 100 sccm
Gases used:
C2H4, N2O, CF4, Ar ,H2
Temperature controller:
Tek-Temp Model MM1500/3000
208 V, 30 A, 60 Hz, 1 phase
27"W x 28"D x 34.5"H
Refrigerant R-12
Mechanical pumps not included.
Exterior Dimensions 
  Width 46.000  in  (116.8 cm)
  Depth 48.000  in  (121.9 cm)
  Height 66.000  in  (167.6 cm)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
 
Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions