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Item ID: 151502

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Dual Chamber Research Sputtering System

In addition to this Mill Lane Engineering Custom Research, Capovani Brothers Inc. stocks a variety of other used and refurbished Thin Film Deposition tools including Sputtering, Electron Beam Evaporators (E Beam) and Thermal Evaporators (Resistive Evaporators). Typical manufactures include Airco Temescal, Applied Materials, CHA Industries, CVC, Denton, Dynavac, Edwards, Leybold, Oerlikon, Temescal, Varian, Veeco Instruments and VonArdenne.

To view our complete stock of used physical vapor deposition, visit our Physical Vapor Deposition Equipmetn Category.

Learn more about our Physical Vapor Deposition (PVD) Equipment Refurbishment and Functional Testing Procedures

This used sputtering system and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus equipment list

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Unit Price Unstated
Number of Units 1
Manufacturer Mill Lane Eng
Model Custom Research
Description Dual Chamber Research Sputtering System
Other Information System Consist of Two Chambers Segregated by a rectangular Gate Valve With a Specimen Transfer System

Chamber 'A' Ion Milling Turbo Pumped
Chamber size: 23"W x 28.5"D x 9"H
Chamber Access: Doors on Front and Side of Chamber
Two vacant 6" ports top of chamber,one KF 40 rear of chamber,
Specimen Transfer: Gear Driven Chamber to Chamber
Ion Mill: Commonwealth 3CM Ion Source
Turbo Pump: Varian TV 250
Vacuum Gauges: Ion and Thermocouple
Chamber Heat: 1000 Watt Quartz Heater
Chamber view port: 3"
Specimen Rotation
Specimen Platten #1 18.5" Diameter,Four 5" Wafers Plus four detents for 4", 2.5" and 3" Wafers
Specimen Platten #2 18.5" Diameter, Four 6" Wafers
Two above platens supplied with system

Chamber 'B' Sputtering Cryo Pumped
Chamber size: 23"W x 28.5"D x 9"H
Chamber Access: Doors on Front and Side of Chamber
Two Vacant KF 40 Ports top of Chamber,Four 1"Dia. ports bottom of chamber
Chamber view port: 3"
Specimen Rotation
Motorized Shutter
Vacuum Gauges: Ion and Thermocouple
Cryo Pump: CTI Cryogenics Cryo Torr 8
Compressor: CTI Cryogenics 8200
Cathodes: Five Siera Applied Sciences 6" DC Magnetron

Control Components
Commonwealth IBS 250 Ion Source Controller
Varian Dual Gauge Controller
Varian V250 Turbo Pump Controller
Pinnacle DC Magnatron Drive

Exterior Dimensions 
  Width 68.000  in  (172.7 cm)
  Depth 69.000  in  (175.3 cm)
  Height 70.000  in  (177.8 cm)
Weight 3,042  lb  (1,380 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions