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in Poly/Nitride Etchers
Item ID: 34890

Offered1 Offered at Best Price


Six Inch Nitride Etcher

Automated Cassette to Cassette single wafer etching.

In addition to this LAM Research Corp. 490 AUTO ETCH, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

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Unit Price Unstated
Number of Units 1
Manufacturer LAM Research Co
Model 490 AUTO ETCH
Wafer Size Range 
  Minimum 75 mm
  Maximum 200 mm
  Set Size 150 mm
Process Nitride Etch
Controller Type Microprocessor Controller Type
Cassette to Cassette YES
  Loadlock Yes/No YES
  Loadlock Pump Manufacturer & Model EBARA A10S
Roughing Pump EBARA A70W
RF Generator Model OEM 650A
Automatch Text ENI 650W 13.56 MHz
Number of Gas Inputs Five Gas
  Number of Chillers 1
  Chiller #1Manufacturer/Model M&W SYSTEMS RPCE 18A
Condition Very Good
Exterior Dimensions 
  Width 45.000  in  (114.3 cm)
  Depth 45.000  in  (114.3 cm)
  Height 66.000  in  (167.6 cm)
Weight 918  lb  (416 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions