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FULL DESCRIPTION of Item 56326

in Cluster PECVD Tools
Item ID: 56326

Offered1 Offered at Best Price


APPLIED MATERIALS AMAT P5000 MARK II SYSTEM

AMAT P5000 Mark II Hybrid System.
Two MxP Etch Chambers, One PECVD Nitride Chamber. Phase III handling system. 28-line onboard gas panel.
Integrated endpoint system with 2 monochromators.
Currently configured for 100mm wafers.


System is fully configurable to your specifications..
APPLIED MATERIALS AMAT P5000 MARK II SYSTEM
Unit Price Unstated
Number of Units 1
Manufacturer Applied Materials
Model P5000
Wafer Size Range 
  Minimum 100 mm
  Maximum 200 mm
  Set Size 100 mm
Number of Chambers 3
Process Capabilities Can be configured to your specifications
Chamber 1 Description MxP Etch chamber configured for 100mm clamped Oxide process.
  • Leybold Mag lev Turbo pump
  • Phase IV RF match
  • Heated gate valve/throttle valve
  • ENI OEM 12 RF Generator
    Can be configured from 100-200mm.<
Chamber 2 Description MxP Etch chamber configured for 100mm clamped Poly process.
  • Leybold Mag lev Turbo pump
  • Phase IV RF match
  • Heated gate valve/throttle valve
  • ENI OEM 12 RF Generator.
    Can be configured from 100-200mm.
Chamber 3 Description N/A
Chamber 4 Description Standard Lamp Heated (100-150mm capable) Configured for 100mm Nitride Process.
  • Includes DPA and DPA generator
  • Phase IV RF match
  • ENI OEM 12 RF Generator Can be configured from 100-150mm.
Chamber 5 Description N/A
Chamber 6 Description N/A
Controller Type VME
Elevator Type 8 Slot
Reduced Pressure YES
Accessories Includes Modular Remote Frame.
Power Requirements 240 V     200.0 A     50/60 Hz     3¬†Phase
Operating Air Pressure 85.00  PSI  (586,100.50 N/sq m)
Condition Excellent

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
 
Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions