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Mass Flow Controllers - Gas


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Capovani Brothers Inc stocks a wide range of used mass flow controllers. We offer a variety of gas types, flow ranges and fitting types. Cleaning and calibration service is available through a third party. Typical manufacturers include Brooks Instruments, Celerity, Millipore Tylan, MKS Instruments, Inc., Mykrolis, Schumacher, and Unit Instruments.

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  • Item IDPhotoItem DescriptionDescriptionGas Type(s)Flow RangeFittingConnector Type#PriceNotes
    MakeModelMaxTypeDiameter
    »slpm  sccm»cm  in$
    173307
    Brooks Instrument 0152EMass Flow readout and controller1
    126879 Brooks Instrument 5850DMass Flow ControllerN250.0VCR0.250Edge Card1 725.00
    4762
    Brooks Instrument 5850EMass Flow ControllerN2200.0VCR0.250Edge Card2 725.00
    126585 Brooks Instrument 5850EMass Flow ControllerN2100.0VCR0.250Edge Card1 725.00
    126878 Brooks Instrument 5850EMass Flow ControllerN25,000.0VCR0.25015-pin D1 725.00
    131526
    Brooks Instrument 5850EMass Flow ControllerH220,000.0VCR0.25015-pin D2 725.00
    131563 Brooks Instrument 5850EMass Flow ControllerN230,000.0VCR0.25015-pin D1 725.00
    131764
    Brooks Instrument 5850EMass Flow ControllerCF4200.0VCR0.250Edge Card2 725.00
    126881 Brooks Instrument 5850EM - Metal SeriesMass Flow ControllerSF6200.0VCR0.25015-pin D1 900.00
    131762
    Brooks Instrument 5850SMass Flow Controller50% N2, 50% O210,000.0VCR0.25015-pin D2 800.00
    131805 Brooks Instrument 5851SMass Flow ControllerN2O50,000.0VCR0.25015-pin D2 1,000.00
    131810 Brooks Instrument 6256SMass Flow ControllerCF4500.0VCR0.25015-pin D2 1,100.00
    129486 Celerity DSWAD10WMass Flow Controller3%/H2/N212,000.0VCR0.250DeviceNet1 1,250.00
    140897
    Celerity GF100CMass Flow ControllerN210.0VCR0.2509-pin D2 650.00 F*
    124387 Millipore Tylan FC-2901VMass Flow ControllerN21,000.0VCR0.25015-pin D1
    133751
    Millipore Tylan FC-2911VMass Flow ControllerH220,000.0VCR0.25015-pin D2 800.00 F*
    129444 Millipore Tylan FC-2911VMass Flow ControllerN220,000.0VCR0.25015-pin D1 880.00
    133883
    Millipore Tylan FC-2921VHigh Flow Mass Flow ControllerN250,000.0VCR0.50015-pin D2 1,000.00 F*
    124379 Millipore Tylan FC280SAVMass Flow ControllerN25,000.0VCR0.2507
    129419
    MKS Instruments 1150C-298VMass Flow ControllerWater 10.0VCR0.5001 3,000.00 F*
    129019
    MKS Instruments 1150C-4037VMass Flow ControllerWater 15.5VCR0.5004 3,000.00
    129439 MKS Instruments 1479A-22604Mass Flow ControllerO210,000.0VCR0.250DeviceNet1 1,195.00
    133749
    MKS Instruments 1479A23CR16MMass Flow ControllerN22,000.0VCR0.250DeviceNet1 1,195.00 F*
    126980 MKS Instruments 1479A23CR16M-SMass Flow ControllerN22,000.0VCR0.250DeviceNet1 1,195.00
    41113
    MKS Instruments 1479A53CR16MMass Flow ControllerN25,000.0VCR0.250DeviceNet4 1,195.00
    134622
    MKS Instruments 179BX52CR34MMass Flow MeterN2500.0VCR0.2509-pin D1 625.00
    163560
    MKS Instruments 212179A53CR15VMass Flow ControllersN21 600.00
    163558
    MKS Instruments 2179A-14CR15VMass Flow ControllerN210,000.01 600.00
    163557 MKS Instruments 2179A-25660Mass Flow Control With Shutoff Valve Gas N2VCR2 600.00
    163559
    MKS Instruments 2179A-25661Mass Flow ControllerN21 600.00
    86701 MKS Instruments 2259C-00100SVMass Flow ControllerN2100.0Compression0.25015-pin D1
    23229
    MKS Instruments 260/261Mass Flow Control System1 3,900.00 F*
    82862
    MKS Instruments 649A-21405Mass Flow Controller w/pressure controllerN210.0VCR0.25015-pin D1 2,040.00 F*
    131522
    MKS Instruments 649A51T11CAVRMass Flow Controller w/Pressure ControllerN210.0VCR0.25015-pin D3 2,040.00 F*
    129423 Mykrolis FC-2900VMass Flow ControllerCF4500.0VCR0.250Edge Card2 880.00
    129425 Mykrolis FC-2900V-4VMass Flow ControllerCHF3500.0VCR0.250Edge Card1 880.00
    129426 Mykrolis FC-2900V-4VMass Flow ControllerO25,000.0VCR0.250Edge Card1 880.00
    191170
    Teledyne Hastings In HFC-202100 SCCM NitrogenN2100.0Compression0.25015-pin D1 N*
    191229
    Teledyne Hastings In HFC-202100 SCCM ArgonArgon100.0Compression0.25015-pin D1 F*N*
    191168
    Teledyne Hastings In THPS-400-115Mass Flow Power Supply1 975.00 F*N*
    42603
    Unit Instruments 3020AMass Flow ControllerN250,000.01 710.00
    128305
    Unit Instruments 3050AHigh Flow Mass Flow ControllerN250,000.0VCR0.50015-pin D1 1,250.00 F*
    42602
    Unit Instruments UFC-1000Mass Flow ControllerSiH4 / PH3VCR0.250Edge Card2 700.00 F*
    42604 Unit Instruments UFC-1020Mass Flow ControllerHe200.0VCR0.250Edge Card1 750.00
    42600 Unit Instruments UFC-1100Mass Flow ControllerMultiple availableVCR0.250Edge Card8 820.00
    42601
    Unit Instruments UFC-1100AMass Flow ControllerMultiple availableVCR0.250Edge Card3 820.00
    129438
    Unit Instruments UFC-1400AMass Flow ControllerCF4500.0VCR0.250Edge Card1 820.00
    129448
    Unit Instruments UFC-1400AMass Flow ControllerN22,000.0VCR0.250Edge Card1 820.00
    129450
    Unit Instruments UFC-1660Mass Flow ControllerNF3500.0VCR0.250Edge Card1 980.00
    129446
    Unit Instruments UFC-1660Mass Flow ControllerNF3500.0VCR0.250Edge Card1 980.00
    129480
    Unit Instruments UFC-1660Mass Flow ControllerN2500.0VCR0.250Edge Card1 980.00
    129066
    Unit Instruments UFC-1660Mass Flow ControllerN21,000.0VCR0.250Edge Card4 980.00
    129070
    Unit Instruments UFC-1660Mass Flow Controller3%/H2/N22,000.0VCR0.250Edge Card2 980.00
    129110
    Unit Instruments UFC-1660Mass Flow ControllerO25,000.0VCR0.250Edge Card3 980.00
    129384
    Unit Instruments UFC-1660Mass Flow ControllerCHF3500.0VCR0.250Edge Card1 980.00
    129456 Unit Instruments UFC-1661Digital Mass Flow ControllerXe10.0VCR0.250Edge Card1 1,250.00
    128304
    Unit Instruments UFC-3100High Flow Mass Flow ControllerN250,000.0VCR0.50015-pin D1 1,250.00 F*
    128213
    Unit Instruments UFC-8100Mass Flow ControllerO220,000.0VCR0.25015-pin D2 880.00
    128233
    Unit Instruments UFC-8100Mass Flow ControllerN21,000.0VCR0.250Edge Card3 880.00
    129170
    Unit Instruments UFC-8100Mass Flow ControllerN2200.0VCR0.250Edge Card1 880.00
    129381
    Unit Instruments UFC-8100Mass Flow ControllerCF4500.0VCR0.250Edge Card4 880.00
    129383
    Unit Instruments UFC-8100Mass Flow ControllerCF420.0VCR0.250Edge Card4 880.00
    129067
    Unit Instruments UFC-8100Mass Flow ControllerO210,000.0VCR0.25015-pin D1 880.00
    42605
    Unit Instruments UFC-8100Mass Flow ControllerCF4 / O2VCR0.250Edge Card2 820.00
    126131
    Unit Instruments UFC-8100Mass Flow ControllerCF4500.0VCR0.250Edge Card2 800.00 F*
    126132
    Unit Instruments UFC-8100Mass Flow ControllerO2
    5,000.0VCR0.250Edge Card2 800.00
    126133
    Unit Instruments UFC-8100Mass Flow ControllerCHF3500.0VCR0.250Edge Card2 800.00
    126136
    Unit Instruments UFC-8100Mass Flow Controller4/H2 / N25,000.0VCR0.250Edge Card2 800.00 F*
    133688
    Unit Instruments UFC-8100Mass Flow ControllerN2200.0VCR0.250Edge Card1 800.00
    129443
    Unit Instruments UFC-8100Mass Flow ControllerN2200.0VCR0.250Edge Card1 880.00
    129069
    Unit Instruments UFC-8165CMass Flow ControllerNH33,000.0VCR0.250DeviceNet1 1,000.00
    129167
    Unit Instruments UFC-8165CMass Flow ControllerO210,000.0VCR0.250DeviceNet1 1,000.00
    129416
    Unit Instruments UFC-8165CMass Flow Controller3%H2/N23,000.0VCR0.250DeviceNet2 1,250.00
    128295
    Unit Instruments UFC-8165CMass Flow ControllerN25,000.0VCR0.250DeviceNet6 1,250.00
    128300
    Unit Instruments UFC-8165CMass Flow ControllerCF41,000.0VCR0.250DeviceNet2 1,250.00 F*
    129020
    Unit Instruments UFC-8165CMass Flow ControllerO21,000.0VCR0.250DeviceNet1 1,250.00
    129065
    Unit Instruments UFC-8165CMass Flow ControllerO210,000.0VCR0.250DeviceNet1 1,250.00

    NOTE:
       photo available
       reference document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.

    Items from the following manufacturers are offered under Mass Flow Controllers - Gas:
    Brooks Instrument, Celerity, Millipore Tylan, MKS Instruments, Inc., Mykrolis, Teledyne Hastings Instruments , Unit Instruments