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Your search for Manufacturer: Plasma-Therm
found:
  • 9 Listing(s) with a matching description:
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes
Make Model
  $  
30246
Plasma-Therm  

Plasma-Therm  

VLR 700 VLR-PM1-ICRB-PM 

List all items of this typeCluster PECVD Tools

in Production Tools

PLASMATHERM VLR 700:

Single Chamber PECVD. Mixed Frequency Deposition
(MFD) Both High Frequency (13.56 MHz) and Low Frequency (50-460 kHz)
RF power delivered both electrodes.

1   F*
142821
Plasma-Therm  

Plasma-Therm  

Unaxis 790 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM:

Shuttle Load Lock System

1  
201152
Plasma-Therm  

Plasma-Therm  

790 RIE PECVD 11" 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX:

Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board.

Both top and bottom electrodes can be powered sequentially.


1  
206582
Plasma-Therm  

Plasma-Therm  

BT 6" RIE MF 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6":

Reactive Ion Etch System

BatchTop VII

1  
50854
Plasma-Therm  

Plasma-Therm  

VII 734 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM PLASMA DEPOSITION SYSTEM/RIE:

Combination Plasma Deposition System/RIE

1   F*
3011
Plasma-Therm  

Plasma-Therm  

Wafer Batch 740/740 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM:

Dual Plasma Etch and Reactive
Ion Etch Processing Systems


System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.

 

1  
4054
Plasma-Therm  

Plasma-Therm  

73/74 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM PECVD AND DUAL PLASMA ETCH/REACTIVE ION ETCH SYSTEM:

Combination PECVD and Dual
Plasma Etch/Reactive Ion Etch
Processing Systems

1  
11919
Plasma-Therm  

Plasma-Therm  

VII 734MF 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

PLASMA-THERM REACTIVE ION ETCH/PLASMA ETCH SYSTEM:

Plasmatherm RIE/Plasma Etch System

1   F*
45428
Plasma-Therm  

Plasma-Therm  

790 ICP 

List all items of this typePoly/Nitride Etchers

in Single Chamber Plasma Tools

PLASMATHERM ICP PLASMA ETCHER:

Inductively Coupled Plasma Etcher with 9.5 Inch Electrode

1   F*

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.