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Mass Flow Controllers - Gas


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Capovani Brothers Inc stocks a wide range of used mass flow controllers. We offer a variety of gas types, flow ranges and fitting types. Cleaning and calibration service is available through a third party. Typical manufacturers include Brooks Instruments, Celerity, Millipore Tylan, MKS Instruments, Inc., Mykrolis, Schumacher, and Unit Instruments.

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Item IDPhotoItem DescriptionDescriptionGas Type(s)Flow RangeFittingConnector Type#PriceNotes
MakeModelMaxTypeDiameter
»slpm  sccm»cm  in$
173307 Brooks Instrument 0152EMass Flow readout and controller 1
126879 Brooks Instrument 5850DMass Flow ControllerN250.0VCR0.250Edge Card 1 725.00
126585 Brooks Instrument 5850EMass Flow ControllerN2100.0VCR0.250Edge Card 1 725.00
4762 Brooks Instrument 5850EMass Flow ControllerN2200.0VCR0.250Edge Card 2 725.00
131526 Brooks Instrument 5850EMass Flow ControllerH220,000.0VCR0.25015-pin D 2 725.00 F*
131563 Brooks Instrument 5850EMass Flow ControllerN230,000.0VCR0.25015-pin D 1 725.00
131764 Brooks Instrument 5850EMass Flow ControllerCF4200.0VCR0.250Edge Card 2 725.00
126881 Brooks Instrument 5850EM - Metal SeriesMass Flow ControllerSF6200.0VCR0.25015-pin D 1 900.00
131762 Brooks Instrument 5850SMass Flow Controller50% N2, 50% O210,000.0VCR0.25015-pin D 2 800.00
131805 Brooks Instrument 5851SMass Flow ControllerN2O50,000.0VCR0.25015-pin D 2 1,000.00
131810 Brooks Instrument 6256SMass Flow ControllerCF4500.0VCR0.25015-pin D 2 1,100.00
196912 Brooks Instrument GF120CMass Flow Controller -- New UnusedArgon50.0VCR0.250 1
196913 Brooks Instrument GF120CMass Flow ControllerArgon50.0VCR0.250 2 F*
196914 Brooks Instrument GF120CMass Flow ControllerArgon5.0VCR0.250 2 F*
231885 Brooks Instrument GF120CMass Flow Controller -- New UnusedArgon5.0VCR0.250 1
129486 Celerity DSWAD10WMass Flow Controller3%/H2/N212,000.0VCR0.250DeviceNet 1 1,250.00
124387 Millipore Tylan FC-2901VMass Flow ControllerN21,000.0VCR0.25015-pin D 1
129444 Millipore Tylan FC-2911VMass Flow ControllerN220,000.0VCR0.25015-pin D 1 880.00
133751 Millipore Tylan FC-2911VMass Flow ControllerH220,000.0VCR0.25015-pin D 2 800.00 F*
124379 Millipore Tylan FC280SAVMass Flow ControllerN25,000.0VCR0.250 7
129019 MKS Instruments 1150C-4037VMass Flow ControllerWater 15.5VCR0.500 4 2,950.00
84813 MKS Instruments 247DReadout and Power Supply for MFC - 4 Channel 2 1,100.00
48144 MKS Instruments ROR IN -SituFlow Verifier 1 F*
129419 MKS Instruments, Inc 1150C-298VMass Flow ControllerWater 10.0VCR0.500 1 2,950.00 F*
243009 MKS Instruments, Inc 1160BMass Flow ControllerN250.0VCR0.250Edge Card 1 725.00
243010 MKS Instruments, Inc 1160BMass Flow ControllerN2100.0VCR0.250Edge Card 1 725.00
243011 MKS Instruments, Inc 1160BMass Flow ControllerN2200.0VCR0.250Edge Card 1 725.00
204819 MKS Instruments, Inc 1179AMass Flow ControllerBF320.0VCR0.25015-pin D 1 725.00
126980 MKS Instruments, Inc 1479A23CR16M-SMass Flow ControllerN22,000.0VCR0.250DeviceNet 1 1,195.00
41113 MKS Instruments, Inc 1479A53CR16MMass Flow ControllerN25,000.0VCR0.250DeviceNet 4 1,195.00
134622 MKS Instruments, Inc 179BX52CR34MMass Flow MeterN2500.0VCR0.2509-pin D 1 625.00
163558 MKS Instruments, Inc 2179A-14CR15VMass Flow ControllerN210,000.0 1 600.00
163557 MKS Instruments, Inc 2179A-25660Mass Flow Control With Shutoff Valve Gas N2VCR 2 600.00
163559 MKS Instruments, Inc 2179A-25661Mass Flow ControllerN2 1 600.00
163560 MKS Instruments, Inc 2179A53CR15VMass Flow ControllersN25,000.0 1 600.00
86701 MKS Instruments, Inc 2259C-00100SVMass Flow ControllerN2100.0Compression0.25015-pin D 1
198805 MKS Instruments, Inc 247CReadout and Power Supply for MFC- 4 ChannelANY 1 950.00
82862 MKS Instruments, Inc 649A-21405Mass Flow Controller w/pressure controllerN210.0VCR0.25015-pin D 1 2,040.00 F*
131522 MKS Instruments, Inc 649A51T11CAVRMass Flow Controller w/Pressure ControllerN210.0VCR0.25015-pin D 2 2,040.00 F*
129423 Mykrolis FC-2900VMass Flow ControllerCF4500.0VCR0.250Edge Card 2 880.00
129425 Mykrolis FC-2900V-4VMass Flow ControllerCHF3500.0VCR0.250Edge Card 1 880.00
129426 Mykrolis FC-2900V-4VMass Flow ControllerO25,000.0VCR0.250Edge Card 1 880.00
191170 Teledyne Hastings In HFC-202Mass Flow ControllerN2100.0Compression0.25015-pin D 1
191229 Teledyne Hastings In HFC-202Mass Flow ControllerArgon100.0Compression0.25015-pin D 1 F*
42603 Unit Instruments 3020AMass Flow ControllerN250,000.0 1 710.00
128305 Unit Instruments 3050AHigh Flow Mass Flow ControllerN250,000.0VCR0.50015-pin D 1 1,250.00 F*
42602 Unit Instruments UFC-1000Mass Flow ControllerSiH4 / PH3VCR0.250Edge Card 2 700.00 F*
42604 Unit Instruments UFC-1020Mass Flow ControllerHe200.0VCR0.250Edge Card 1 750.00
42600 Unit Instruments UFC-1100Mass Flow ControllerMultiple availableVCR0.250Edge Card 8 820.00
42601 Unit Instruments UFC-1100AMass Flow ControllerMultiple availableVCR0.250Edge Card 3 820.00
129438 Unit Instruments UFC-1400AMass Flow ControllerCF4500.0VCR0.250Edge Card 1 820.00
129448 Unit Instruments UFC-1400AMass Flow ControllerN22,000.0VCR0.250Edge Card 1 820.00
129450 Unit Instruments UFC-1660Mass Flow ControllerNF3500.0VCR0.250Edge Card 1 980.00
129446 Unit Instruments UFC-1660Mass Flow ControllerNF3500.0VCR0.250Edge Card 1 980.00
129480 Unit Instruments UFC-1660Mass Flow ControllerN2500.0VCR0.250Edge Card 1 980.00
129066 Unit Instruments UFC-1660Mass Flow ControllerN21,000.0VCR0.250Edge Card 4 980.00
129070 Unit Instruments UFC-1660Mass Flow Controller3%/H2/N22,000.0VCR0.250Edge Card 2 980.00
129110 Unit Instruments UFC-1660Mass Flow ControllerO25,000.0VCR0.250Edge Card 3 980.00
129384 Unit Instruments UFC-1660Mass Flow ControllerCHF3500.0VCR0.250Edge Card 1 980.00
129456 Unit Instruments UFC-1661Digital Mass Flow ControllerXe10.0VCR0.250Edge Card 1 1,250.00
128304 Unit Instruments UFC-3100High Flow Mass Flow ControllerN250,000.0VCR0.50015-pin D 1 1,250.00 F*
128213 Unit Instruments UFC-8100Mass Flow ControllerO220,000.0VCR0.25015-pin D 2 880.00
128233 Unit Instruments UFC-8100Mass Flow ControllerN21,000.0VCR0.250Edge Card 3 880.00
129170 Unit Instruments UFC-8100Mass Flow ControllerN2200.0VCR0.250Edge Card 1 880.00
129381 Unit Instruments UFC-8100Mass Flow ControllerCF4500.0VCR0.250Edge Card 4 880.00
129383 Unit Instruments UFC-8100Mass Flow ControllerCF420.0VCR0.250Edge Card 4 880.00
129067 Unit Instruments UFC-8100Mass Flow ControllerO210,000.0VCR0.25015-pin D 1 880.00
42605 Unit Instruments UFC-8100Mass Flow ControllerCF4 / O2VCR0.250Edge Card 2 820.00
126131 Unit Instruments UFC-8100Mass Flow ControllerCF4500.0VCR0.250Edge Card 2 800.00 F*
126132 Unit Instruments UFC-8100Mass Flow ControllerO2
5,000.0VCR0.250Edge Card 2 800.00
126133 Unit Instruments UFC-8100Mass Flow ControllerCHF3500.0VCR0.250Edge Card 2 800.00
126136 Unit Instruments UFC-8100Mass Flow Controller4/H2 / N25,000.0VCR0.250Edge Card 2 800.00 F*
129443 Unit Instruments UFC-8100Mass Flow ControllerN2200.0VCR0.250Edge Card 1 880.00 F*
133688 Unit Instruments UFC-8100Mass Flow ControllerN2200.0VCR0.250Edge Card 1 800.00
129069 Unit Instruments UFC-8165CMass Flow ControllerNH33,000.0VCR0.250DeviceNet 1 1,000.00 F*
129167 Unit Instruments UFC-8165CMass Flow ControllerO210,000.0VCR0.250DeviceNet 1 1,000.00
129416 Unit Instruments UFC-8165CMass Flow Controller3%H2/N23,000.0VCR0.250DeviceNet 2 1,250.00
128295 Unit Instruments UFC-8165CMass Flow ControllerN25,000.0VCR0.250DeviceNet 6 1,250.00
128300 Unit Instruments UFC-8165CMass Flow ControllerCF41,000.0VCR0.250DeviceNet 2 1,250.00 F*
129020 Unit Instruments UFC-8165CMass Flow ControllerO21,000.0VCR0.250DeviceNet 1 1,250.00
129065 Unit Instruments UFC-8165CMass Flow ControllerO210,000.0VCR0.250DeviceNet 1 1,250.00

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Mass Flow Controllers - Gas:
Brooks Instrument, Celerity, Millipore Tylan, MKS Instruments, Inc., Mykrolis, Teledyne Hastings Instruments , Unit Instruments