Semiconductor Metrology Equipment
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DIGITAL INSTRUMENTS / VEECO ATOMIC FORCE MICROSCOPE NANOSCOPE IIIA
Atomic Force Microscope AFM Scanning Probe Microscope SPM
Stage size: 300mm
Accessories:
- Stage Controller: NanoScope Model 5000C-1
- Scanning Probe Microscope Controller: NanoScope IIIA
- Vibration Isolation Table and Acoustic Enclosure
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NANOMETRICS CRITICAL DIMENSION COMPUTER
Critical Dimension Computer
Large memory digital computer calculates line widths and provides statistics on in process wafer and photomasks.
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