Other Lamps
USHIO SUS 55
Excimer VUV/03 Cleaning Unit UV Cleaning Applications:
- Enhancement of wetability and adhesion of photoresist
- Enhancement of wetability of SOG
- Cleaning before deposition process
- Soft ashing
- High-speed removal of static electricity
- Cleaning of reticles Features:
- Simple dry cleaning allows removal of most of organic matter
- No charging damage
- Instantaneous on/off operation suited to single-wafer process
- Low-temperature process
- Cleaning process can be performed under atmospheric air
