Radio Frequency (RF) Generators
ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY, 10000 WATT, 40 KHZ
Representative photo
Radio Frequency (RF) Generators
Representative photo
Radio Frequency (RF) Generators
Radio Frequency Generator
Barrel/Box Plasma Etchers
Plasma Etcher
Metal Etchers
Technics Micro Stripper Series 200 Plasma System
Barrel/Box Plasma Etchers
Planar Plasma Etcher
Radio Frequency (RF) Generators
The RAS Split Inductor is designed for use with Advanced Energy PEor PEII 10 kW (or lower) power supply systems
Radio Frequency (RF) Generators
Radio Frequency Generator The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability.
Radio Frequency (RF) Generators
Radio Frequency Generator Representative photo
Cluster Plasma Tools - Metal
Like New Condition System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field). The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications. Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.
Barrel Resist Strippers
Barrel Resist Stripper Branson P3075/2
Cluster Plasma Tools - Oxide
Dielectric Cluster Tool Trion Technology Oracle
Barrel/Box Plasma Etchers
Plasma Treatment System Desmear/Etchback Advanced Plasma Systems and March Instruments, manufacturer of plasma systems, were aquired by Nordson. Both companies merged and are an entity of Nordson - now called Nordson MARCH.